International Precision Incorporated

Takashi Yanaka

Kohei Shirota

Mitsusuke Kyogoku

Kazuo Ohsawa

In an electron beam apparatus such as a transmission electron microscope, a specimen holder device which comprises a specimen holder member and a holding rod connected thereto is withdrawably inserted in a pole-gap defined between upper and lower poles of an objective lens of the electron beam apparatus. An opening having a greater diameter than that of the pole end face is formed in the specimen holding member at a center portion for receiving therein a specimen mesh of a reduced thickness. A recess is formed in the specimen holding member at that portion which is caused to pass between the upper and lower magnetic poles upon insertion and withdrawal of the specimen to and from the interpole gap so that a region resulting from the formation of the recess has a reduced thickness as compared with the remaining region of the specimen holder member. Inter-pole gap of the objective lens is thus reduced to increase resolving power thereof. The specimen holder member can be mounted in a frame-like supporting member rotatably about an axis which extends perpendicularly to the center axis of the holding rod, while the frame-like supporting member being inclinable around the axis of the holding rod.

Electron beam apparatus with improved specimen holder

This invention relates to a method and apparatus for obtaining a single photograph of electron microscope images, with low gain in magnification, of relatively thick specimen, which photograph is suitable for direct comparison with a corresponding photograph of the same specimen obtained with an optical microscope: wherein either the specimen or the electron beam is so manipulated that the electron beam passes discretely and stepwisely through sequential portions of the specimen, and prior to impinging on the photographic plate the electron beam is screened to eliminate any portion thereof which would produce aberrations or other distortion and is controllably directed to impinge on a portion of the photographic plate which corresponds to the portion of the specimen through which the beam is passing.

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Hino, Japan

Takashi Yanaka