Seiko Epson Corporation

Epson Toyocom Corporation

Takashi Yamazaki

Makoto Furuhata

Akihiko Ebina

Keigo Iizawa

Keiichi Yamaguchi

Seiichiro Ogura

Masahiro Oshio

Takeo Funakawa

Michiaki Takagi

Shigeo Kanna

Tsukasa Funasaka

Osamu Kawauchi

Daisuke Kirihara

Masami Maeda

Yuji Hamayama

Satoru Hayashi

Akinori Yamada

Junichi Takeuchi

Masayuki Kikushima

Hiroaki Fujimori

Osamu Iwamoto

Yoshihiko Yokoyama

Toshioki Shimojima

Kenichi Kurokawa

Masahiro Ishii

Yoshio Maeda

Satoshi Nakamura

Akira Mizuguchi

Yukio Kitahara

Tsuyoshi Tabata

Hidekazu Yanagisawa

Naohisa Maeda

A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.

Vibration element, manufacturing method of vibration element, physical quantity sensor, inertial measurement device, electronic apparatus, and vehicle

Vibration element, physical quantity sensor, inertial measurement unit, electronic apparatus, and vehicle

A vibrator device includes: a base; a vibrator disposed in the base; and a lid including a substrate having a light transmitting property and a silicon substrate joined to the substrate and a part of the base surrounding the vibrator.

Vibrator device, manufacturing method of vibrator device, electronic device, and vehicle

A vibration device includes a base substrate made of silicon and having a first surface and a second surface facing away from the first surface, a lid bonded to the base substrate, a vibrator disposed at the first surface of the base substrate and accommodated in a space between the base substrate and the lid, and a thermistor element disposed at the base substrate.

Vibration device, electronic apparatus, and vehicle

A vibration element includes: a base; an arm continuous with the base; a first electrode that includes a first layer of titanium nitride and a second layer containing nitrogen, titanium, and oxygen, and is disposed on the arm; an aluminum nitride layer in contact with the second layer; and a second electrode disposed on the aluminum nitride layer.

Vibration element, electronic apparatus, and vehicle

A resonator includes a surface silicon layer as a base material, a first silicon oxide layer disposed on a first surface of the surface silicon layer, and a second silicon oxide layer disposed on the opposite side to the surface silicon layer of the first silicon oxide layer, wherein when the thickness of the surface silicon layer is represented by tsi, the thickness of the first silicon oxide layer is represented by ta, and the thickness of the second silicon oxide layer is represented by tb, the following relationships are satisfied: 0.138&#xd7;tsi&#x3c;ta&#x3c;0.268&#xd7;tsi and 0.189&#xd7;tsi&#x3c;tb&#x3c;0.527&#xd7;tsi.

Resonator, oscillator, electronic apparatus, and vehicle

A MEMS element includes a surface silicon layer on which an element is formed and on which a first electrode and a second electrode as element electrodes and an electrode pad connected to the first electrode and the second electrode are disposed, and in which a first wiring through-hole is disposed at a position overlapping with the electrode pad of the surface silicon layer and a wiring electrode electrically connected to the electrode pad is disposed in the first wiring through-hole, in plan view.

MEMS element, sealing structure, electronic device, electronic apparatus, and vehicle

An electronic component transport apparatus includes: an openable and closable first opening and closing portion; a first rotation support portion which supports the first opening and closing portion to be rotatable; a second opening and closing portion provided to be openable and closable in the first opening and closing portion; and a second rotation support portion which supports the second opening and closing portion to be rotatable. An area of the first opening and closing portion is greater than an area of the second opening and closing portion.

Electronic component transport apparatus and electronic component inspection apparatus

A vibrator (electronic device) includes: a vibrator element including vibrating arms; a base portion supporting the vibrator element and having a rectangular shape in a plan view; and a lid provided on the side of the vibrator element opposite to the base portion. Extending directions of long and short sides of the base portion and an extending direction of the vibrating arms cross each other. When an angle formed by the vibrating arms and a Y-axis direction is &#x3b8;, the angle &#x3b8; is more than 0&#xb0; and less than 90&#xb0;.

Electronic device, electronic apparatus, and moving object

A resonator element includes a resonator blank having a base portion, a vibrating arm, a linking portion, and a connecting portion connects the base portion and the linking portion to each other, in which, when a thickness of the resonator blank is set to T, a width of the base portion is set to W1, and a width of the connecting portion is set to W2, a relationship of 50 &#x3bc;m&#x2266;T&#x2266;210 &#x3bc;m is satisfied, and a relationship of 0.067&#x2266;W2/W1&#x2266;0.335 is satisfied, and in which, when a width of the arm section of the vibrating arm is set to W3, and a width of the hammer head is set to W4, a relationship of W4&#x2267;2.8&#xd7;W3 is satisfied.

Resonator element, resonator, oscillator, electronic apparatus, and mobile object

A vibrator element includes: a base portion; and a vibrating arm extending from the base portion, the vibrating arm including a piezoelectric film that contains Cu at a crystal grain boundary.

Piezoelectric film producing process, vibrator element, vibrator, oscillator, electronic device, and moving object

A vibrator element includes a base portion, a vibrating arm extending from the base portion, a first electrode provided on the vibrating arm, a second electrode provided above the first electrode, a piezoelectric body arranged between the first electrode and the second electrode, and an insulating film arranged between the first electrode and the piezoelectric body, in which the material of the first electrode contains TiN, the material of the insulating film contains SiO, and the material of the piezoelectric body contains AlN.

Vibrator element, vibrator, oscillator, electronic apparatus, and moving object

A tuning fork type vibrator element, as a vibrator element, includes a base formed on a plane including a first axis and a second axis orthogonal to the first axis, a connection portion extending in a first axis direction from the base, with a thickness thereof being smaller than that of the base and a vibrating arm extending in the first axis direction from one end portion of the connection portion, with a thickness thereof being the same as that of the connection portion, in which the vibrating arm performs flexural vibration along a vertical direction with respect to the plane, and in which the connection portion is provided such that a relationship between a length L2 in the first axis direction of the connection portion and a length L1 in the first axis direction of the vibrating arm falls within a range of L1/15&#x2266;L2&#x2266;L1.

Growing community of inventors

Shiojiri, Japan

Takashi Yamazaki