Rigaku Corporation

Takashi Yamada

Shuichi Kato

Yoshiyuki Kataoka

Kazuhiko Omote

Hajime Fujimura

Yuichiro Shimizu

A wavelength dispersive X-ray fluorescence spectrometer includes a single one-dimensional detector () having detection elements () arranged linearly, and includes a detector position change mechanism () for setting a position of the one-dimensional detector () to either a parallel position at which an arrangement direction of the detection elements () is parallel to a spectral angle direction of a spectroscopic device () or an intersection position at which the arrangement direction intersects the spectral angle direction. At the parallel position, a receiving surface of the one-dimensional detector () is located at a focal point of focused secondary X-rays (). At the intersection position, a receiving slit () is disposed at the focal point of the focused secondary X-rays (), and the receiving surface is located at a traveling direction side of the focused secondary X-rays () farther from the spectroscopic device () than the receiving slit ().

Wavelength dispersive X-ray fluorescence spectrometer

A wavelength dispersive X-ray fluorescence spectrometer of the present invention includes: a position sensitive detector () configured to detect intensities of secondary X-rays () at different spectral angles, by using detection elements () corresponding to the secondary X-rays () at different spectral angles; a measured spectrum display unit () configured to display a relationship between a position, in an arrangement direction, of each detection element (), and a detected intensity by the detection element (), as a measured spectrum, on a display (); a detection area setting unit () configured to be set a peak area and a background area; and a quantification unit () configured to calculate, as a net intensity, an intensity of the fluorescent X-rays to be measured, based on a peak intensity in the peak area, a background intensity in the background area, and a background correction coefficient, and to perform quantitative analysis.

Wavelength dispersive x-ray fluorescence spectrometer and x-ray fluorescence analyzing method using the same

A grazing incidence X-ray fluorescence spectrometer () of the present invention includes: a bent spectroscopic device () to monochromate X-rays () from an X-ray source () and generate an X-ray beam () focused on a fixed position () on a surface of a sample (S); a slit member () disposed between the bent spectroscopic device () and the sample (S) and having a linear opening (); a slit member moving unit () to move the slit member () in a direction that intersects the X-ray beam () passing through the linear opening (); a glancing angle setting unit () to move the slit member () by using the slit member moving unit (), and set a glancing angle (&#x3b1;) of the X-ray beam () to a desired angle; and a detector () to measure an intensity of fluorescent X-rays () from the sample (S) irradiated with the X-ray beam ().

Grazing incidence x-ray fluorescence spectrometer and grazing incidence x-ray fluorescence analyzing method

An X-ray fluorescence spectrometer includes: an X-ray source () to irradiate, with primary X-rays (), a sample () that is multiple nanoparticles placed on a substrate (); an irradiation angle adjustment unit () to adjust an irradiation angle at which a surface () of the substrate is irradiated; a detection unit () to measure an intensity of fluorescent X-rays () from the sample (); a peak position calculation unit () to generate a sample profile representing change of the intensity of the fluorescent X-rays () against change of the irradiation angle, and to calculate a peak irradiation angle position; a particle diameter calibration curve generation unit () to generate a calibration curve; and a particle diameter calculation unit () to calculate a particle diameter of nanoparticles of an unknown sample () by applying the peak irradiation angle position of the unknown sample () to the calibration curve.

Growing community of inventors

Takatsuki, Japan

Takashi Yamada