Panasonic Intellectual Property Management Co., Ltd.

Panasonic Corporation

Matsushita Electric Industrial Co., Ltd.

Takashi Urashima

Daichi Higashi

Jun Yokoyama

Kazumasa Takata

Yohei Takechi

Tomotaka Furuta

Michio Sakurai

Hirotoshi Oikaze

Toru Sakai

Hidetoshi Utsuro

Yasuhiro Kabetani

Shohei Aoki

Kenta Kubota

A laser processing apparatus includes a laser oscillator that oscillates processing laser light to be incident on a processing point on a processing surface of a workpiece, a coupling mirror that deflects or transmits the processing laser light and measurement light to be incident on the processing point toward the processing point, a measurement light deflection unit that changes an incident angle of the measurement light on the coupling mirror, a lens that concentrates the processing laser light and the measurement light on the processing point, a controller that controls the laser oscillator and the measurement light deflection unit, a measurement processor that measures a depth of a keyhole generated at the processing point by the processing laser light by using an optical interference signal based on an interference generated by an optical path difference between the measurement light reflected at the processing point and reference light, and a beam position measurement unit that measures positions of the processing laser light and the measurement light.

Laser processing apparatus and laser processing method

A phase-contrast microscope includes a light source section configured to emit light; a light guide including a plurality of optical fibers, the light guide transmitting the light emitted from the light source section through the plurality of optical fibers; and an object lens including a lens and an annular phase film, the annular phase film being on the side to which light passes through the lens, the object lens being configured to enlarge an image on a sample irradiated with the light transmitted by the light guide. The plurality of optical fibers include a plurality of emission faces arranged to form a ring, and the light guide is disposed in such a manner that the plurality of emission faces are in a conjugate position to the annular phase film.

Phase-contrast microscope with ring-structured fiber lighting and a conjugate-positioned annular phase film

Laser welding is performed while moving irradiation positions of a laser beam and a measurement beam in forward, rightward, rearward and leftward directions, and the penetration depth of a weld portion is measured during laser welding in each of the directions. Then, a direction in which a value smaller than a reference value is measured is determined to be an optical axis deviation direction, and a correction value is added to the values measured during the laser welding when the laser welding is performed in the optical axis deviation direction.

Laser welding method

A laser welding device () for welding a weld part () with laser light (L) includes: a laser emitting head () overlapping the laser light (L) and a measurement light (S) coaxially with each other and applying the laser light (L) and the measurement light (S) to the weld part (), the measurement light (S) having a wavelength different from a wavelength of the laser light (L); a first parallel plane plate and a second parallel plane plate, changing an irradiation position of the measurement light (S) such that the irradiation position orbitally move around a center of rotation that moves on a predetermined welding path in a radius of rotation that is smaller than ½ of a spot diameter of the laser light (L); a measuring instrument () repeatedly measuring a weld penetration depth of the weld part () based on the measurement light (S) that is emitted from the laser emitting head () and is reflected on the weld part () while the measurement light (S) is being orbitally moved; and a determiner () determining the weld penetration depth of the weld part () using a plurality of measured values of the weld penetration depth, the plurality of measured values being measured by the measuring instrument () within a fixed time period while shifting a start time point of the fixed time period.

Laser welding device and laser welding method

A laser processing apparatus is used which includes: a laser oscillator that oscillates a processing laser beam at a processing point to be processed on a surface of a workpiece; an optical interferometer that emits a measurement beam to the processing point and generates an optical interference intensity signal based on interference generated due to an optical path difference between the measurement beam reflected at the processing point and a reference beam; a first mirror that changes traveling directions of the processing laser beam and the measurement beam; a second mirror that changes an incident angle of the measurement beam onto the first mirror; a lens that focuses the processing laser beam and the measurement beam on the processing point; a memory that stores corrected processing data; a control unit that controls the laser oscillator, the first mirror, and the second mirror based on the corrected processing data; and a measurement processing unit that derives a depth of a keyhole generated at the processing point by the processing laser beam, based on the optical interference intensity signal.

Laser processing apparatus, laser processing method, and correction data generation method

A laser welding apparatus includes: a laser oscillator configured to emit a laser beam toward a welding portion of a welded material; an optical interferometer configured to generate an interference signal that indicates an intensity of an interference beam of a measurement beam reflected by the welding portion and a reference beam; and a derivation unit configured to generate, based on the interference signal, two-dimensional tomographic image data indicating a correlation among a distance in a proceeding direction of welding of the welding portion, a depth of the welding, and an intensity of the interference signal, to extract specified depth tomographic image data within a specified range from the two-dimensional tomographic image data, and to derive a depth for each distance based on the intensity of the interference signal in the specified depth tomographic image data.

Laser welding apparatus and laser welding method

A laser welding apparatus includes: a first optical element that coaxially emits, to a welded part, a laser beam emitted from a laser light source and an object beam having a different wavelength from the laser beam; a second optical element that causes the spot diameter of the object beam to be larger than the spot diameter of the laser beam on the welded part; an optical interferometer that emits the object beam to the first optical element, detects through the first optical element the object beam reflected on the welded part, and generates an electric signal based on the detected object beam; and a measuring unit that measures a penetration depth of the welded part based on the electric signal.

Laser welding apparatus

With a film thickness measuring apparatus of the present invention, a substrate having a transparent film formed on its front surface is placed on a placement unit. A half mirror divides light from a light source such that divided light beams are emitted to the front surface of the substrate and to a reference plane, and overlays reflected light from the front surface of the substrate and reflected light from the reference plane on each other to form interfering light. The interfering light is imaged by an imager. Based on the imaging result, the film thickness of the transparent film is calculated by an arithmetic unit. An optical filter with which an intensity spectrum of transmitted light exhibits a plurality of peaks, the optical filter is disposed between the light source and the half mirror.

Film thickness measuring apparatus using interference and film thickness measuring method using interference

The measurement accuracy of an apparatus for measuring the surface shape of an object utilizing a two-wavelength phase-shift interferometry is improved. A low-coherence light source, a plurality of wavelength filters with different transmission wavelengths, an angle control unit and an analysis unit are provided. When performing a two-wavelength phase shift method, the analysis unit detects the wavelength difference between two wavelengths, and corrects a calculated wavelength value and a calculated phase value of one of the wavelengths for preventing a fringe-order calculation error. Next, the angle of the wavelength filters is controlled for making the actual wavelength difference coincident with a designed value. Thus, the wavelength difference between the two wavelengths is continuously controlled to be constant, which enables measurements of surface shapes with high accuracy, even when there are wavelength fluctuations due to the temperature change or the time elapse.

Surface shape measurement apparatus and method

By diffracting light emitted from a collimator lens into lights of different orders by a transmission diffraction grating, applying the diffracted lights to a flat surface of an object, forming the light that has been reflected on the flat surface of the object and thereafter retransmitted through the transmission diffraction grating into an image in a position located apart from the optical axis of the outgoing light and measuring the angle of the object with respect to the optical axis of the collimator lens using the image location and the order of the light formed as the image, the angle in a wide range can be measured with a high resolving power.

Angle measuring device and method

An inspection method for evaluating the performance of an optical component at high precision is provided. According to the inspection method, a first light beamand a second light beamboth having different phases are generated from light which has passed through an optical component, and are interfered with each other to form an interference region. A linear line, a linear lineand linear linesare set within the interference regionso as to determine a distribution of light intensities on each of the linear lines. Then, a frequency corresponding to the maximal light intensity is determined. Further, an approximated liner line or an approximated curved line is determined from a plurality of frequencies determined for each of the linear line. Then, the aberration of the optical component is evaluated based on the coefficient of the approximated linear or curved line.

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Osaka, Japan

Takashi Urashima