Sharp Kabushiki Kaisha Corporation

Takashi Sugihara

Masaya Hijikigawa

Shuji Miyoshi

Yasuhiko Inami

Hiroki Tabuchi

Takashi Fukushima

Kazutaka Uda

Junkou Takagi

Akihito Jinda

Shoei Kataoka

Hisatoshi Furubayashi

Nobuo Hashizume

A spatial filter used in a reduction-type projection printing apparatus includes a central region through which a light beam passes at transmittance of at most a prescribed value, a substantially transparent peripheral region which surrounds the central region, and a phase shifter for producing phase difference of 180.degree. between light beams passing through the central region and the peripheral region.

Spatial filter used in a reduction-type projection printing apparatus

A filter for use in a projection photolithographic system comprising:

Filter for projection photolithographic system

A moisture-sensitive device comprising a substrate such as silicon substrate, a pair of belt-like heating elements extending over recesses formed in the substrate, the heating elements being composed of a resistive film of platinum or nickel and a heat-resistant insulating film covering the resistive film in which one of the heating elements acts as a detector element and the other as a reference element, which device can exactly determine an absolute humidity irrespective of sudden changes of temperature.

Moisture-sensitive device

A sensor having a pair of sensor units, one of which is a detecting sensor unit and the other of which is a reference sensor unit, wherein each of the units comprises a substrate with a hollow portion, a thin insulating layer with a bridge, cantilever or diaphragm shape disposed on the substrate, a sensitive film disposed on the bridge, cantilever or diaphragm portion of the thin insulating layer, and a pair of electrodes being in contact with the sensitive film, the sensitive film section of the detecting sensor unit being exposed to an atmosphere to be measured so that the electrical resistance of the sensitive film changes with a variation in the physical quantity of the atmosphere to be detected, and the sensitive film section of the reference sensor unit being sealed within a shielding container so that the electrical resistance of the sensitive film is not influenced by a variation in the physical quantity of the atmosphere outside of the container, whereby the absolute physical quantity of the atmosphere to be detected is determined by the output power of the sensor based on a difference between the electrical resistance of the detecting sensor unit and the electrical resistance of the reference sensor unit.

Sensor

A moisture sensitive resistive element includes a substrate made of an electrically non-conductive material, first and second electrodes deposited on the substrate in a spaced relation to each other, and a moisture sensitive film deposited on the substrate covering both the first and second electrodes. The moisture sensitive film is formed by a material given by a formula: [--CH(C.sub.6 H.sub.4 SO.sub.3 X)--CH.sub.2 --].sub.n wherein X is any one of a hydrogen atom, metal atom, ammonium, urea, triethylenediamine, tetramethyleneguanidine and hexamethylenediamine, or formed by a mixture of the above material with a hydrophilic polymer which is any one selected from a group consisting of polyvinyl alcohol, methyl cellulose and polyamide resin.

Moisture sensitive resistive element

A moisture sensitive material prepared by crosslinking cellulose acetate through at least one compound selected from the group consisting of compounds containing two or more isocyanate groups; compounds containing two or more epoxy groups; compounds containing two or more carboxyl groups ##STR1## and acid anhydrides of carboxylic acids.

Moisture sensitive material

A moisture sensitive material prepared by cross-linking cellulose acetate through at least one selected from the group consisting of compounds containing two or more isocyanate groups; compounds containing two or more epoxy groups; compounds containing two or more carboxyl groups ##STR1## and acid anhydrides of carboxylic acids.

Moisture sensor

A pressure sensor element includes a polymer optical conductor which includes a substrate, a first organic polymer film formed on the substrate, a second organic polymer film superposed on the first organic polymer film, and an optical reflecting film provided on a patterned end face of the first organic polymer film. The first organic polymer film portion within the pattern has a refractive index different from that of the substrate. The first organic polymer film portion outside the pattern has substantially the same refractive index as the substrate. The refractive index of the second organic polymer film is substantially the same as that of the first organic polymer film portion outside the pattern. At least either one of the refractive indexes of the first and second organic polymer films changes with pressure fluctuation.

Optical pressure sensor

A moisture responsive element comprises a moisture responsive organic membrane in contact with electrically conductive members, in which the organic membrane consists essentially of a crosslinked organic polymer having a hydrophilic group. The element has excellent water and moisture resistance, long-term stability and excellent humidity response over a range of humidity from 0 to 100 percent. The moisture responsive element includes a protective layer of cellulose acetate and/or polyvinyl acetate.

Growing community of inventors

Nara, Japan

Takashi Sugihara