Rigaku Industrial Corporation

Kabushiki Kaisha Toshiba

Takashi Shoji

Yasujiro Yamada

Tadashi Utaka

Kunihiro Miyazaki

Yoshiyuki Kataoka

Tsuyoshi Matsumura

Ayako Shimazaki

Naoki Kawahara

Kouichi Aoyagi

Hisayuki Kohno

Akira Arake

Minoru Inoue

Masatsugu Kuraoka

Takashi Misonoo

Takashi Sakamoto

Tomoya Arai

A scanning X-ray fluorescence spectrometer includes a quantitatively analyzing device () which calculates the concentration of hexavalent chrome based on the fact that the peak spectroscopic angle, at which the maximum intensity is attained in Cr&#x2014;K&#x3b1; line (), changes depending on the ratio of the concentration of the hexavalent chrome vs. the concentration of the intensity of the total chrome. A plurality of detecting device () having different resolutions as a combination of a divergence slit (), a spectroscopic device (), a receiving slit () and a detector () is provided such that when the change of the peak spectroscopic angle is to be detected, a detecting device (B) having a higher resolution than that of the detecting device (A), which is selected when the concentration or the intensity of the total chrome is to be determined, is selected.

X-ray fluorescence spectrometer and program for use therewith

A fluorescent X-ray analyzing apparatus capable of being used as either a wavelength dispersive type or an energy dispersive type is provided, with which the analysis can be performed quickly and accurately. The fluorescent X-ray analyzing apparatus includes a detecting unit for detecting and analyzing fluorescent X-ray (,) emitted from at least one target area (,) of a sample (,) to be analyzed as a result of excitation of such target area (,) with a primary X-ray (,). The detecting unit includes a wavelength dispersive type detecting unit (,) including a spectroscope (,) and a first detector (,), and an energy dispersive type detecting unit (,) including a second detector (,) of an energy dispersive type. The angle &thgr;1 formed between a first path (,) of travel of the fluorescent X-ray from the target area (,) towards the spectroscope (,) and a surface of the sample (,) is equal to the angle &thgr;2 formed between a second path (,) of travel of the fluorescent X-ray from the target area (,) towards the second detector (,) of the energy dispersive type and a surface of the sample (,), but the second path (,) is shorter than the first path (,).

Fluorescent X-ray analyzer useable as wavelength dispersive type and energy dispersive type

A fluorescent X-ray analyzing apparatus includes a source of excitation (2) for irradiating a silicon-based sample (S) with primary X-rays (B2) to excite the silicon-based sample (S), a detector (4) for detecting fluorescent X-rays (B5) emitted from the silicon-based sample (S), and an analyzer (6) for analyzing elements contained in the silicon-based sample (S) based on a result of detection performed by the detector (4). The primary X-rays (B2) emitted from the source of excitation (2) have a wavelength higher than, but in the vicinity of a wavelength at an Si--K absorption edge so that generation of fluorescent X-rays (B5) of Si is suppressed to minimize a noise which would occur during detection of fluorescent X-rays (B5) of Na and Al to thereby accomplish an accurate analysis of a minute quantity of NA and Al contained in the sample (S).

Fluorescent X-ray analyzing apparatus

An X-ray analysis apparatus including an artificial multi-layered grating for rendering X-ray beams to be monochromatic before they are incident on a specimen to be analyzed. This artificial multi-layered grating operates to diffract the X-ray beam, generated from an X-ray radiation source and subsequently impinging on a reflective surface of the artificial multi-layered grating, at a predetermined angle of diffraction to provide the monochromatic X-ray beams. The periodicity of the spacing of lattice planes of the artificial multi-layered grating is so chosen as to be of a value progressively varying along the reflective surface thereof with an increase in distance from the X-ray radiation source. The X-ray analysis apparatus herein disclosed is designed to avoid any possible reduction of the intensity of the X-ray beams which would occur when they are rendered to be monochromatic, and to increase the intensity of the X-ray beams to ensure an improved accuracy in spectroscopic analysis.

X-ray analysis apparatus

An X-ray spectroscope comprising a soller slit consisting of a number of parallel plates and disposed such that one end thereof faces an X-ray emitting portion of a sample to be analyzed and a plurality of analysing crystals or total reflection mirrors disposed parallel to one another and spaced apart from one another at a suitable interval. The analysing crystals or total reflection mirrors are orientated with their one ends directed to the other end of the soller slit and such that X-rays having passed through the soller slit are incident on them with a desired angle of incidence. Also, these analysing crystals or total reflection mirrors each have a convex back side defined by inclined surfaces respectively parallel with incident and reflected X-rays and facing the reflecting surface of the next adjacent analysing crystal or total reflection mirror. With this X-ray spectroscope it is possible to make effective use of X-rays and prevent divergence in directions normal to the diffracting surface, thus permitting analysis with high efficiency.

X-ray spectroscope

Growing community of inventors

Takatsuki, Japan

Takashi Shoji