Horiba Stec, Co., Ltd.

Horiba, Ltd.

Takashi Shirai

Hiroyuki Okano

Isao Fujita

A thermal flow meter is provided that can accurately correct zero point and span errors, which change depending on an ambient temperature, independently of a fluid type. The thermal flow meter includes: a flow path through which measuring target fluid flows; an upstream side electrical resistive element provided on the upstream side of the flow path; a downstream side electrical resistive element provided on the downstream side of the flow path; and a flow rate calculation part that calculates a flow rate of the measuring target fluid on the basis of an upstream side voltage that is a voltage applied to the upstream side electrical resistive element, a downstream side voltage that is a voltage applied to the downstream side electrical resistive element, and the thermal conductivity of the measuring target fluid.

Thermal flow meter, temperature measurement device, and thermal flow meter program

The present invention is configured to, on the basis of an upstream side parameter having a value that is related to a change rate of an upstream side voltage when a flow rate of measuring target fluid changes, and a downstream side parameter having a value that is related to a change rate of a downstream side voltage when the flow rate of the measuring target fluid changes, calculate a fluid-specific value exhibiting a specific value depending on the thermal conductivity of the fluid.

Fluid analysis device

A thermal flow rate sensor is provided which includes a main flow path through which a fluid flows, and a sensor flow path that branches off from the main flow path so as to cause the fluid to flow in a split flow and that is provided with a flow rate detecting mechanism configured to detect a flow rate of the fluid. The flow rate detecting mechanism includes an upstream-side coil and a downstream-side coil, each configured by using a heat-generating resistance wire wound around a sensor flow pipe forming the sensor flow path. A peak position of a temperature distribution generated in the sensor flow path by the upstream-side coil and the downstream-side coil is positioned on the upstream-side coil side relative to the middle position between the upstream-side coil and the downstream-side coil on the sensor flow path.

Thermal flow rate sensor

A reference electrode for use in testing liquid at a high pressure, has an internal liquid containing body having an internal liquid containing space therein and a liquid-junction one side of which is exposed to the high pressure liquid to be tested and the other side of which is exposed to the internal liquid contained in the internal liquid containing space. A reference electrode body surrounds the internal liquid containing body and defines a pressure compensating space between the internal liquid containing body and the inside of the reference electrode body, the pressure compensating space being open outwardly of the reference electrode body at a part there of which is exposed to the high pressure liquid to be tested when the reference electrode is in position for normal use, the pressure compensating space receiving the high pressure liquid to be tested therein. A flexible bellows is provided between the spaces and in liquid tight engagement with the internal liquid containing body for compensating for the pressure of the high pressure liquid to be tested on the internal liquid through the liquid-junction.

Growing community of inventors

Kyoto, Japan

Takashi Shirai