Nissin Ion Equipment Co., Ltd.

Sankyo Company, Limited

Takashi Sakamoto

Shigeru Mio

Weijiang Zhao

Toyokuni Honma

Soji Sugai

Yuta Iwanami

Shinsuke Inoue

Jian Wang

A wafer support device includes a support base having a wafer-facing surface, the support base comprising a heater, and an electrostatic chuck supported by the support base, the electrostatic chuck having an attraction surface configured to attract a wafer for wafer processing. During the wafer processing, the wafer-facing surface and the attraction surface are positioned at respective different positions in a direction perpendicular to the wafer-facing surface so that the attraction surface is separated from the wafer-facing surface by a distance.

Wafer supporting device

An ion implantation apparatus includes a transfer device that transfers a wafer, a support device that supports the wafer at an implantation position, and a control device that controls the ion implantation apparatus to perform chain implantation processing on the wafer, and that controls the transfer device or the support device according to warpage information of the wafer.

Ion implantation apparatus

Compounds of formula (I): ##STR1## (in which: R.sup.1 and R.sup.2 are each hydrogen, optionally substituted alkyl, optionally substituted alkenyl, alkynyl, alkoxy, aryl or pyridyl, or R.sup.1 and R.sup.2 together represent alkylene; A and B are each hydrogen, halogen, optionally substituted alkyl, optionally substituted alkenyl, optionally substituted alkoxy, alkylthio, alkylsulfonyl, dialkylsulfamoyl, aliphatic carboxylic acyl, carboxy, --CONR.sup.a R.sup.b where R.sup.a and R.sup.b are each hydrogen or alkyl, formyl or cyano groups; D represents optionally substituted phenyl, benzyl, pyridyl or pyrimidinyl; and n is 0, 1 or 2; and salts and esters thereof) have valuable herbicidal properties, and, since they are totally innocuous to rice plants, are especially useful for the treatment of paddy fields.

Pyrazole derivatives having herbicidal activity and their use

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Shiga, Japan

Takashi Sakamoto