Hitachi, Ltd.

Other

National Institute of Advanced Industrial Science and Technology

Hitachi Engineering Services Co., Ltd.

Takashi Nishi

Masami Matsuda

Makoto Kikuchi

Tsutomu Baba

Koichi Chino

Shin Tamata

Toshiaki Matsuo

Kiyomi Funabashi

Hideo Yusa

Takayuki Matsumoto

Atsushi Yukita

Tatsuo Izumida

Takashi Ikeda

Yoshimasa Kiuchi

Itaru Komori

Takehiko Kitamori

Katsumi Ohsumi

Shunsuke Uchida

Masahiko Mori

Takeyuki Kondo

Tomohiro Sato

Haruo Fujimori

Youichi Sakakibara

Kazumichi Suzuki

Tetsuo Fukasawa

Masashi Oda

Kenji Noshita

Mamoru Kamoshida

Akira Sasahira

Hideo Hashida

Tomoya Yoshida

Yoshihiro Ozawa

Masashi Shimizu

Osamu Kuriyama

Tetsuro Adachi

Akira Sasahiro

Shin Tamada

Kiminori Iga

Kiyotaka Ueda

A method is provided for processing a silicon-based wire optical waveguide, by which an optical transmission loss of the silicon-based wire optical waveguide due to ion irradiation with high energy is suppressed, and an end portion of the silicon-based wire optical waveguide that is three-dimensionally curved in a self-aligning manner is obtained. According to the method a protective film is selectively formed on the silicon-based wire optical waveguide exclusive of the end portion of the silicon-based wire optical waveguide; and ions are implanted to the silicon-based wire optical waveguide in a particular direction, so as to curve the end portion of the silicon-based wire optical waveguide to the particular direction in a self-alignment manner.

Method for processing silicon-based wire optical waveguide

A photosensitive material is coated on an insulating material () stacked on a substrate () (FIG.A), and exposed and developed using a mask having a light-shielding film capable of controlling a light transmittance from 100% to 0% annularly and continuously to form a spiral photosensitive material (FIG.B). After conducting treatment at a high temperature, the insulating material under the photosensitive material is spirally formed by etching (FIG.C). A metal () is stacked on the substrate (FIG.D), and a photosensitive material is coated (FIG.E). The photosensitive material is exposed and developed using a mask having an annular light-shielding film with a light transmittance of 0% to leave the photosensitive material covering only the metal on the base of the spiral structure (FIG.F). After treatment at a high temperature is conducted and the metal exposed is etched (FIG.G), the photosensitive material is removed (FIG.H).

Method of manufacturing a longitudinal microsolenoid

The present invention relates to an exposure controlling photomask used to form a three-dimensional face structure in a resist pattern and having a light interrupting film able to be continuously controlled in transmitted light amount from 100% to 0%, and a production method thereof. A light interrupting filmis deposited on a substrate, and a photosensitive materialis coated on this light interrupting film. Next, irradiation is performed by changing the irradiating amount of an electron beam every place of the photosensitive materialusing an electron beam exposure technique. Next, development is performed and the photosensitive material is formed in the three-dimensional face structure. Next, in an etching process, the three-dimensional face structure is transferred to the light interrupting filmby etching-back the photosensitive materialand the light interrupting filmas a foundation.

Exposure controlling photomask and production method therefor

In order that a wormis rotated, a clearance (a region constituting a clearance portion between bearings and a worm gear) is formed (FIGS.() to ()) in an upper surface of a base plate. A moldfor forming a lower half region of the worm therein is formed (FIG.()). A materialfor the worm is deposited (FIG.()) to a height equal to that of a lower half region plus that of an upper half of the worm. An upper half of the worm is formed (FIGS.() to (). Finally, the materialin the clearance between the base plateand gearis removed (FIG.()).

Gear and method of making the same

Radioactive laundry liquid wastes are supplied in a liquid waste heating vessel. Hydrogen peroxide and an alkali solution are supplied to the liquid waste heating vessel. The pH of the radioactive laundry liquid wastes is adjusted to 7 or higher by the alkali solution. The radioactive laundry liquid wastes are heated to 50&deg; C. or higher by a heating device and introduced to first and second aeration vessels. The temperature is controlled by a device in accordance with the value measured by a thermometer. Ozone is supplied from an ozone generator by way of an ozone gas discharge port to the first aeration vessel. Ozone discharged from the first aeration vessel is introduced from the ozone gas discharge port to the second aeration vessel. Therefore, the amount of ozone dissolved into the radioactive laundry liquid wastes is increased so that the amount of hydroxy radicals formed for decomposing organic substances increases, since the laundry liquid wastes are heated to 50&deg; C. or higher under the presence of hydrogen peroxide.

Method of and apparatus for treating radioactive liquid wastes containing surface active agents

Neutron shielding materials and a cask for spent fuel

A photosensitive material is coated on an insulating material ( ) stacked on a substrate ( ) (FIG. A), and exposed and developed using a mask having a light-shielding film capable of controlling a light transmittance from 100% to 0% annularly and continuously to form a spiral photosensitive material (FIG. B). After conducting treatment at a high temperature, the insulating material under the photosensitive material is spirally formed by etching (FIG. C). A metal ( ) is stacked on the substrate (FIG. D), and a photosensitive material is coated (FIG. E). The photosensitive material is exposed and developed using a mask having an annular light-shielding film with a light transmittance of 0% to leave the photosensitive material covering only the metal on the base of the spiral structure (FIG. F). After treatment at a high temperature is conducted and the metal exposed is etched (FIG. G), the photosensitive material is removed (FIG. H).

Microsolenoid coil and its manufacturing method

An incineration and melting furnace has a furnace main body that is filled with a conductive heat generation body (for example, graphite). Radioactive combustible materials in contact with the conductive heat generation body are burnt and the radiaoactive incombustible materials are melted. The resultant exhaust gases and the molten products flow downwardly in the conductive heat generation body filled region and flow out of a molten product discharging port. Noxious gases such as dioxins contained in the exhaust gases are thermally decomposed into a non-toxic state in a high temperature portion of the conductive heat generation region.

Solid material melting apparatus

Radioactive laundry liquid wastes are supplied in a liquid waste heating vessel. Hydrogen peroxide and an alkali solution are supplied to the liquid waste heating vessel. pH of radioactive laundry liquid wastes is adjusted to 7 or higher by the alkali solution. The radioactive laundry liquid wastes are heated to 50&deg; C. or higher by a heating device. The heated radioactive laundry liquid wastes are introduced to first and second aeration vessels. Ozone is supplied from an ozone generator by way of an ozone gas discharge port to the first aeration vessel. Ozone discharged from the first aeration vessel is introduced from the ozone gas discharge port to the second aeration vessel. Therefore, the amount of ozone dissolved into the radioactive laundry liquid wastes is increased so that the amount of hydroxy radicals formed for decomposing organic substances increases, since the laundry liquid wastes are heated to 50&deg; C. or higher under the presence of hydrogen peroxide.

Method of treating radioactive liquid wastes containing surface active agents

An object of the present invention is to improve retainability (distribution coefficient) for C-14 of a radioactive waste solidified body. The waste is solidified with a solidification agent containing a soluble substance which yields an insoluble substance by a reaction with carbonic ions, insoluble carbonates, or a mixture of the above substances. And, as for a pre-treatment, the soluble substance which yields an insoluble substance by a reaction with carbonic ions is previously reacted with liquid waste, and subsequently the solidification is performed. The retainability (distribution coefficient) for C-14 of the solidified body of the waste increases about one order.

Solidification agents for radioactive waste and a method for processing

A processing system for radioactive waste is composed of an adjusting tank having a sampling port, a solidification processing system, and a package inspection apparatus, and a package, of which inventory per a package has been exactly grasped, is prepared by solidification of the waste with the processing system after determining radioactivity of the waste by measurement before the solidifying process. In accordance with the present invention, data on radioactivity before and after preparation of package of waste become clear, and management of each package at transportation and intermediate storage of the packages is facilitated.

Radioactive waste processing system

Objective of the present invention is to provide a preferable solidified body ensuring performance of artificial barrier in a solidifying process for incombustible miscellaneous solid waste and other wastes such as calcined ashes by preventing generation of hydrogen gas by a reaction of amphoteric metal included in the waste with solidifying materials. In order to suppress the reaction of the amphoteric metal with the solidifying materials, any one or arbitrary plurality of the following three means are provided in the solidifying materials; (1) A means for forming protection film on surface of the amphoteric metal, (2) A means for enhancing hydration reaction of cement, (3) A means for reducing basicity of the solidifying materials. In accordance with the present invention, a preferable solidified body can be obtained by a simple and easy method which does not necessitate separation and pre-treatment of the waste.

Method for solidification of waste, and apparatus, waste form, and

According to the present invention, a fibrous material having a property to adsorb radioactive nuclides in the form of ion or molecule onto its surface is added to a cement type hydraulic solidifying material used for a solidifying material, a waste container, a structure in disposal site and a back-filling material used for production of a waste form of radioactive wastes, whereby improvement of long-term endurance of the waste form, the structure and the like and diminishment of leaching of radioactivity from the waste form and the like can be simultaneously attained.

Solidifying materials for radioactive waste disposal, structures made of

The present invention adds carbonates or chlorides of alkaline earth metals to the radioactive wastes containing sodium sulfate and subjects sulfate group in the radioactive wastes to reduction treatment, thereby converts the sulfate group into sulfides of alkaline earth metals which are chemically stable substances while suppressing SOx generation, and solidifies the radioactive wastes stably for an extended period of time by applying to the converted radioactive wastes solidifying treatment.

Disposal method of radioactive wastes

Method of cementing radioactive waste and cemented body

Growing community of inventors

Hitachi, Japan

Takashi Nishi