Tokyo Electron Limited

Takashi Niinuma

Kippei Sugita

Mitsuru Dohiwa

Hana Sasaki

Hikaru Fujiwara

Kaoru Inaba

A calibration method includes placing an LED light source having a given wavelength range inside a reference apparatus; acquiring first data as an emission intensity of light at a wavelength, a light amount of the light being adjusted in stages by changing the light amount output from the LED light source; storing the first data in a memory; placing the LED light source in a calibration target apparatus; acquiring second data as an emission intensity of light at a wavelength, a light amount of the light being adjusted in the stages by changing the light amount output from the LED light source; and calculating a calibration formula based on the first data stored in the memory and the second data.

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Miyagi, Japan

Takashi Niinuma