Nippon Telegraph and Telephone Corporation

Takashi Morimoto

Toshio Kobayashi

Yukio Okazaki

Hiroshi Inokawa

Masayasu Miyake

Tsutomu Horiuchi

Osamu Niwa

Yuko Ueno

A micro-fluidic cell for optical detection of gases provided according to the present invention includes a concentration cell and a detection cell, and increases the sensitivity of optical detection of gases, selectivity of components, and accuracy of quantitative determination, and also achieves a low electric power consumption and a small-sized, light-weight configuration of the entire apparatus.

Micro-fluidic cell for optical detection of gases and method for producing same

A method for fabricating semiconductor devices wherein polysilicon gates for complementary-type field-effect semiconductor devices are formed of polysilicon to which impurity doped simultaneously to the polysilicon deposition; the both gates having the dual N.sup.+ /P.sup.+ polysilicon gate structure, so that the both N- and P-channel transistors are formed as the surface-channel type ones; and therefore, the off-characteristic, the short channel effect, and the controllability of threshold voltage are progressed. More specifically, N- and P-channel MISFETs are provided on a common semiconductor substrate (1); N-type polysilicon (9) doped with N-type impurity is adopted as the gate electrode for the N-channel MISFET; P-type polysilicon (8) doped with P-type impurity is adopted as the gate electrode for the P-channel MISFET; and a narrow region preventing the mutual diffusion of impurities is provided between portions of respective polysilicon.

Complementary metal-insulator-semiconductor devices

Method for fabricating CMOS semiconductor devices

Growing community of inventors

Kawasaki, Japan

Takashi Morimoto