Kabushiki Kaisha Yaskawa Denki

Takashi Minami

Yoshiki Kimura

Shinichi Katsuda

Daisuke Shin

A transfer system includes a hand that supports a workpiece to be transported; an arm that moves the hand; a scanning controller that moves the hand by the arm along a scanning direction that intersects sides which are provided to be fixed to the hand and not parallel with each other, such that the sides pass a known reference position in a transfer path of the workpiece; and a position detector that detects a positional deviation of the hand in a direction intersecting the scanning direction, based on a timing at which one of the side reaches the reference position and a timing at which the other side reaches the reference position RP, while the scanning controller is moving the hand.

Transfer system and transfer control method

A robot system includes a robot including a first hand, a second hand, an arm mechanism, and an elevator. The first hand is to hold a substrate. The second hand is to hold the substrate. The arm mechanism supports the first hand and the second hand to provide a height difference between the first hand and the second hand in a height direction of the robot. The elevator is to move the arm mechanism in the height direction within a moving range larger than the height difference. Both the first hand and the second hand put the substrate in the holder. Circuitry is configured to control the robot to move the arm mechanism in the height direction by the elevator to pass the substrate from the first hand to the second hand via the holder.

Robot system and carrying method

A robot system includes: a robotic hand configured to load and unload a workpiece into and from a cassette in which a plurality of workpieces are aligned in a first direction; a sensor configured to detect the workpiece; a transporter configured to change a relative position of the sensor with respect to the cassette in the first direction and in a second direction; and circuitry configured to: control the transporter to arrange the sensor at a first position; command the sensor to scan in the first direction, to acquire first mapping data; control the transporter to arrange the sensor at a second position by changing the relative position of the sensor in the second direction; command the sensor to scan in the first direction, to acquire second mapping data; and determine that one or more of the workpieces are inclined based on the first and second mapping data.

Robot system and incline detection method

A robot system includes a robot including a robot arm, and a first hand and a second hand which are connected to the robot arm and which are provided to independently rotate about an axis on the robot arm; and a controller configured to control an operation of the robot. When the robot arm and the first hand are operated so that the first hand reaches a predetermined target position, teaching values for the first hand in the target position is generated. When the first hand and the second hand are rotated based on the teaching values for the first hand, a relative error in rotation amount around the axis between the first hand and the second hand is acquired and stored in a memory. Teaching values for the second hand is generated from the teaching values for the first hand based on the acquired relative error.

Robot system, robot teaching method and control device therefor

A transfer system includes a robot including a hand configured to transfer a substrate, a transfer chamber within which the robot is disposed, a plurality of substrate-storing cassettes disposed side by side on a sidewall of the transfer chamber in a plan view, and a robot control device configured to control an operation of the robot based on teaching information. The robot control device includes an operation controller configured to cause the robot to transfer the substrate to a storage position while slanting a hand centerline toward the robot away from a storage centerline with respect to a first cassette and while superimposing the hand centerline on the storage centerline with respect to a second cassette.

Transfer system and transfer method

A transfer system according to an embodiment includes a plurality of robot hands, a storage unit, and an instructing part. The robot hands are operable to hold a thin sheet-like workpiece. The storage unit stores therein speed information that represents a temperature of the workpiece associated with a specified speed of a robot hand that holds the workpiece. The instructing part extracts the specified speed for each robot hand from the speed information and instructs to move all of the robot hands at or lower than a representative speed determined based on a set of extracted specified speed data.

Transfer system

A transfer system includes a substrate positioning device, robots having a first robot and a second robot; and robot control devices, the robot control devices including a first robot control device to which the first robot and the substrate positioning device are connected and a second robot control device to which the second robot is connected. The first robot control device includes an acquiring unit configured to acquire, from the substrate positioning device, at least an absolute deviation amount between the rotation center of the mounting table and a center position of the substrate positioned, and a transmitting unit configured to transmit correction information relying on the absolute deviation amount acquired by the acquiring unit, to the second robot control device to which the second robot is connected.

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Fukuoka, Japan

Takashi Minami