Honda Giken Kogyo Kabushiki Kaisha

Canon Kabushiki Kaisha

Rheon Automatic Machinery Co., Ltd.

Honda Giken Kogyo K.k.

Kuraray Chemical Co., Ltd.

Kashima Oil Co., Ltd.

Nihon Tokushu Toryo Co., Ltd.

Takashi Maeda

Tsuyoshi Yamashita

Mitsuo Nakamura

Hiroshi Suzuki

Torahiko Hayashi

Michio Morikawa

Minoru Noguchi

Shigeki Oyama

Takeshi Fujino

Kenji Sato

Shinji Wakui

Shushi Nishimura

Naohiko Oki

Isao Iwai

Makoto Shiokawa

Toshihisa Kenmochi

Kazuyuki Okui

Yuji Kawabuchi

Hideo Fujii

Hiroshi Osada

Takahiro Haga

A charged particle beam exposure apparatus which splits a charged-particle beam from a charged-particle beam source into a plurality of charged-particle beams by a plurality of apertures formed in an aperture array to expose a wafer using the plurality of charged-particle beams. The apparatus includes a stage on which the wafer is loaded, the wafer being irradiated with the plurality of charged-particle beams, which have been passed through the apertures of the aperture array, a plurality of detection electrodes which detect intensities of the plurality of charged-particle beams passing through the plurality of apertures of the aperture array to expose the wafer with the plurality of charged-particle beams, the plurality of detection electrodes being formed on the charged-particle beam source side of the light-shielding peripheral regions of the plurality of apertures of the aperture array, and a grid array which adjusts the intensities of the plurality of charged-particle beams on the basis of detection results obtained by the plurality of detection electrodes.

Charged-particle beam exposure apparatus and method

To produce activated carbon for an electrode of an electric double-layer capacitor, the following steps are carried out sequentially: a step of subjecting a massive mesophase pitch to a pulverizing treatment to provide a pulverized powder; a step of subjecting the pulverized powder to an infusibilizing treatment under conditions of a temperature in a range of 300&#xb0; C. (inclusive) to 450&#xb0; C. (inclusive) in the atmospheric air current, a step of subjecting the pulverized powder to a carbonizing treatment under conditions of a temperature in a range of 600&#xb0; C. (inclusive) to 900&#xb0; C. (inclusive) in an inert gas current to provide a carbonized powder, a step of subjecting the carbonized powder to an alkali activating treatment under conditions of a temperature in a range of 500&#xb0; C. (inclusive) to 1,000&#xb0; C. (inclusive) in an inert gas atmosphere, followed by the post treatments, thereby producing alkali-activated carbon, and a step of subjecting the alkali-activated carbon to a pulverizing treatment. If an electrode is produced using the activated carbon, the electrode density can be increased.

Method for producing activated carbon for electrode of electric double-layer capacitor

This invention relates to an active anti-vibration apparatus having an anti-vibration table on which a stage is mounted. This anti-vibration apparatus includes a pneumatic spring actuator for supporting and driving the anti-vibration table, a PI compensator for PI-compensating a target velocity signal determined by a velocity profile concerning the stage and necessary for driving the stage, and a motion mode distributing operation unit for controlling the pneumatic spring actuator in accordance with an output signal from the PI compensator.

Active anti-vibration apparatus and exposure apparatus

A vehicle body panel having a honeycomb sandwich structure in which a honeycomb core is sandwiched between a first and a second plate includes a subhoneycomb panel formed by adhering the first plate to one major surface of the honeycomb core beforehand. The subhoneycomb panel is pressed against the second plate which is constituted by a part of a structural panel of a vehicle body with the intermediary of an adhesive layer, the other major surface of the honeycomb core being adhered to the second plate. The connection of the subhoneycomb panel to the second plate is performed after the structural panel has been connected to a strength member of the vehicle body, e. g. after a washing stage. Such a vehicle body panel with a honeycomb sandwich structure is achievable without resorting to any substantial modification of an existing vehicle body assembly line.

Method of fabricating vehicle body panel having honeycomb sandwich

A sound-absorption material for an automobile includes a damping material, a sound-absorption material and a surface material. The damping, sound-absorption and surface materials are integrated together. The damping material includes a moldable plastic constraining material and an adhesive damping sheet containing a petroleum resin. The sound-proof material is integrally attachable to an automotive sheet material such as a dashboard.

Automotive sound-proof materials and damping materials therefor

A roof lining structure in a motor vehicle includes a roof lining base member and a vibration-damping layer interposed between an upper surface of the base member and a lower surface of a roof panel of the motor vehicle. The roof lining base member comprises a support layer having a cellular structure, and a reinforcing layer disposed at least partly in the roof lining base member. The upper surface of the vibration-damping layer is held in intimate contact with the lower surface of the roof panel. The vibration-damping layer is bonded to the roof panel by an adhesive layer. The vibration-damping layer is made of a material having such a mechanical strength that the vibration-damping layer will be torn apart vertically with a tearing force weaker than the bonding strength of the adhesive layer.

Roof lining structure for motor vehicle

An apparatus for continuously stretching dough for cakes, bread and the like, comprising a plurality of rollers progressing along a closed orbit comprising a lower straight portion, a plurality of conveyor belts positioned thereunder, with the upper flights of said conveyor belts being spaced apart from each other.

Apparatus for stretching dough material

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Utsunomiya, Japan

Takashi Maeda