Hitachi Maxell, Limited

Hitachi Maxwell, Ltd.

Takashi Kubota

Kunio Wakai

Akira Yano

Tetsuo Mizumura

Yoichi Ogawa

Hideo Kusada

Michio Asano

Tsunemi Ohiwa

Minoru Ichijo

Fumio Kokai

A continuous plasma CVD apparatus, characterized in that frequency of high-frequency bias is in the range of 50-900 KHz, a blocking condenser is provided between a thin film and a high-frequency source so that the product C&middot;f of electrostatic capacity C of the blocking condenser and frequency f of the high-frequency source is 0.02 &lsqb;F&middot;Hz&rsqb; or more, and the total of impedances of all the rollers provided in the route of from a substrate unwind roller to a rotating drum is 10 k&OHgr; or more and the total of impedances of all the rollers provided in the route of from the rotating drum to a wind roller is 10 k&OHgr; or more. According to this apparatus, it becomes possible to continuously form a film without causing damage and deterioration of the substrate.

Plasma CVD apparatus

A continuous plasma CVD apparatus, characterized in that frequency of high-frequency bias is in the range of 50-900 KHz, a blocking condenser is provided between a thin film and a high-frequency source so that the product C.multidot.f of electrostatic capacity C of the blocking condenser and frequency f of the high-frequency source is 0.02 [F.multidot.Hz] or more, and the total of impedances of all the rollers provided in the route of from a substrate unwind roller to a rotating drum is 10 k.OMEGA. or more and the total of impedances of all the rollers provided in the route of from the rotating drum to a wind roller is 10 k.OMEGA. or more. According to this apparatus, it becomes possible to continuously form a film without causing damage and deterioration of the substrate.

A magnetic recording medium comprising a substrate, a magnetic layer and a protective layer which consists of an organic polymeric material comprising carbon atoms, hydrogen atoms and oxygen atoms, the content of the oxygen atoms increasing towards the outer surface of the protective layer, which has improved durability and corrosion resistance.

Magnetic recording medium and production thereof

Growing community of inventors

Tsukuba, Japan

Takashi Kubota