Kabushiki Kaisha Toshiba

Ebara Corporation

Toshiba Infrastructure Systems & Solutions Corporation

Takashi Kishi

Norio Takami

Yasuhiro Harada

Akira Tanaka

Takashi Kuboki

Hiroki Inagaki

Kazuomi Yoshima

Jumpei Fujikata

Yoko Suzuki

Takuya Iwasaki

Yoshio Minami

Hidesato Saruwatari

Masashi Shimoyama

Yasunobu Yamashita

Taro Fukaya

Motoya Kanda

Masaki Kinoshita

Tomoko Sugizaki

Wen Zhang

Toshiki Miyakawa

Yuji Satoh

Nobuyuki Takahashi

Tsuyoshi Kobayashi

Satoshi Mikoshiba

Keigo Hoshina

Jun Tamura

Mizuki Nagai

Kazuki Ise

Hiroki Iwanaga

Tetsuya Sasakawa

Yorikazu Yoshida

Kazuhiro Yasuda

Kazuhito Tsuji

Miho Maruyama

Suguru Sakugawa

Toshikazu Nomura

A polishing apparatus capable of preventing condensation on an inner surface of a transparent window provided in a polishing pad and capable of achieving accurate measuring of a film thickness is disclosed. The polishing apparatus includes: a polishing pad having a polishing surface; a polishing head configured to press a workpiece against the polishing surface; a transparent window disposed in the polishing pad; a polishing table configured to support the polishing pad; an optical sensor head located below the transparent window and configured to direct light to the workpiece through the transparent window and receive reflected light from the workpiece through the transparent window; and a cooling device configured to cool a space between the transparent window and the optical sensor head.

Polishing apparatus and polishing method

According to one embodiment, a secondary battery includes a positive electrode, a negative electrode, a nonaqueous electrolyte and a separator. The positive electrode includes a halide including one or more metal elements selected from the group consisting of copper, iron, nickel, cobalt, tin, and zinc. The negative electrode includes one or more selected from the group consisting of lithium metal, a lithium alloy, and a compound capable of having Li inserted and extracted. The nonaqueous electrolyte contains aluminum ions. The separator has lithium ion conductivity and is interposed between the positive electrode and the negative electrode.

Secondary battery, battery pack, vehicle, and stationary power supply

According to one embodiment, a composite electrolyte includes inorganic solid particles, an ionic liquid and 0.5 to 10% by weight of a fibrous polymer. The ionic liquid includes cations and anions. The fibrous polymer has an average fiber diameter of 1 to 100 nm.

Composite electrolyte, secondary battery, battery pack, and vehicle

A polishing-pad laminated structure which allows for easy alignment of a through-hole of a polishing pad with a sensor head installed in a polishing table is disclosed. The polishing-pad laminated structure includes a polishing pad and a release sheet. The polishing pad has a through-hole located at a position corresponding to a position of a sensor head disposed in the polishing table. The release sheet covers an adhesive surface of the polishing pad. The release sheet is divided into at least a first release sheet and a second release sheet. The first release sheet has a surface area smaller than a surface area of the second release sheet.

Polishing-pad laminated structure, polishing-pad positioning instrument, and method of attaching a polishing pad to a polishing table

According to a management method in an embodiment, in charging of a battery in each of a constant current mode and a constant power mode, it is determined that the battery is unusable based on a voltage of the battery dropping by a voltage threshold value or more from a starting time of dropping without increasing again to a voltage value at the starting time of dropping. In the management method, in charging of the battery in a constant voltage mode, it is determined that the battery is unusable based on a current supplied to the battery increasing by a current threshold value or more from a starting time of increasing without dropping again to a current value at the starting time of increasing.

Management method, management device, management system, battery-mounted apparatus, and non-transitory storage medium

According to one embodiment, information related to a positive-electrode electric potential and a negative-electrode electric potential of each of one or more batteries is acquired, and whether deviation of the positive/negative-electrode electric potentials from a reference state is beyond a prescribed range is determined for each of one or more batteries. Further, in response to at least existence of a battery-to-be-restored that is a battery in which the determined deviation of positive/negative-electrode electric potentials from a reference state is beyond a prescribed range, a state of charge of the battery-to-be-restored is held in a restoration holding range for a prescribed time.

Charge and discharge control device for preventing battery deterioration, battery pack, vehicle, and charge and discharge control method

According to one embodiment, there is provided an electrode group including an electrically insulating layer, a first electrode, and a second electrode. The second electrode is stacked in a first direction on the first electrode with the electrically insulating layer interposed therebetween. The first electrode includes plural first end portions in one or more second directions among directions orthogonal to the first direction. The plural first end portions are disposed at different positions in at least one of the second directions.

Electrode group, secondary battery, battery pack, and vehicle

According to one embodiment, a secondary battery is provided. The secondary battery includes a negative electrode. The negative electrode includes an active material composite. The active material composite includes active material particles and a layer covering at least a portion of surfaces of the active material particles. The active material particles include titanium-containing oxide particles. The layer contains N and Si. The layer includes a first surface facing the at least the portion of surfaces of the active material particles and a second surface defining a layer thickness from the first surface. An N concentration in the layer decreases from the first surface to the second surface. A Si concentration in the layer increases from the first surface to the second surface.

Secondary battery, battery pack, and vehicle

The present invention improves the hydrophilicity of a substrate surface, and suppresses variation in the degree of hydrophilicity with each substrate. A plating apparatus is provided that performs a plating process on a substrate having a resist pattern. This plating apparatus includes a pretreatment bath that performs hydrophilic treatment by bringing a pretreatment liquid into contact with a surface to be plated of the substrate, and a plating bath that performs a plating process on a substrate that has undergone the hydrophilic treatment. The pretreatment bath includes a pretreatment liquid supplying device that supplies the pretreatment liquid into the pretreatment bath, and an ultraviolet light irradiation device that irradiates ultraviolet light onto the surface to be plated of the substrate.

Plating apparatus and plating method

According to one embodiment, a solid electrolyte separator is provided. The solid electrolyte separator is a sheet containing a solid electrolyte having a lithium ion conductivity. A first lithium ion conductivity in a peripheral edge region along an in-plane direction of the sheet is lower than a second lithium ion conductivity in a central region along the in-plane direction of the sheet.

Solid electrolyte separator, secondary battery, battery pack, and vehicle

According to one embodiment, a nonaqueous electrolyte battery includes a positive electrode, a negative electrode, and a nonaqueous electrolyte. The positive electrode includes at least one oxide selected from the group consisting of a first oxide having a spinel structure and represented by LiNiMnO, a second metal phosphate having an olivine structure and represented by LiMnFePO, and a third oxide having a layered structure and represented by LiNiMnCoO. The nonaqueous electrolyte includes a first solvent. The first solvent includes at least one compound selected from the group consisting of trimethyl phosphate, triethyl phosphate, tripropyl phosphate, tributyl phosphate, and fluorinated phosphate ester.

Nonaqueous electrolyte battery and battery pack

A resistance measuring module for measuring electric resistance of a substrate holder is provided. The substrate holder has an electric contact configured to feed a current to a held substrate and contactable with the substrate. The substrate holder is able to hold a testing substrate for measurement of electric resistance of the substrate holder, and is configured such that the electric contact comes into contact with the testing substrate in a state where the testing substrate is held. The resistance measuring module includes: a test probe contactable with the testing substrate held in the substrate holder; and a resistance measuring instrument for measurement of a resistance value between the electric contact and the probe via the testing substrate.

Plating device, plating method, substrate holder, resistance measuring module, and substrate holder testing method

A plating method includes holding a substrate with a substrate holder while bringing a sealing member into pressure contact with a peripheral portion of the substrate to form an enclosed internal space in the substrate holder; performing a first-stage leakage test of the substrate holder by producing a vacuum in the internal space and checking whether pressure in the internal space reaches a predetermined vacuum pressure within a certain period of time; and if the substrate holder has passed the first-stage leakage test, performing a second-stage leakage test of the substrate holder by closing off the internal space after producing the vacuum therein and checking whether a change in the pressure in the internal space reaches a predetermined value within a certain period of time.

Plating method and plating apparatus

According to one embodiment, a nonaqueous electrolyte battery includes a positive electrode, a negative electrode and a nonaqueous electrolyte. The negative electrode includes a titanium and niobium-containing composite oxide. The nonaqueous electrolyte includes at least one compound selected from compounds represented by the formulas (1) and (2). 

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Yokosuka, Japan

Takashi Kishi