Omron Corporation

Takashi Kinoshita

Hiroshi Okabe

Teruhisa Yotsuya

Kiyoshi Murakami

Yoshihiro Kanetani

Toshihiko Matsumoto

Yasunori Asano

A target surface of a target object including portions having different curvatures is inspected by using an illuminating device and a camera that are fixed, a supporting device for supporting the target object such that its position and orientation are variable. The position and orientation of the target object are controlled as its image is obtained for a plurality of times. The position and orientation of the target object are controlled such that the image of any point on the target surface will be included in at least one of the images obtained by the camera.

Device for and method of inspecting surface condition having different curvatures

Preparation steps are taken before a substrate with components is inspected and a whole image of a standard substrate is prepared preliminarily and inspection areas are determined for target portions to be inspected on this whole image. At the time of the inspection, a camera is positioned corresponding to a target portion to obtain a target image and an area corresponding to the target image is extracted from the whole image and displacement values of this area are calculated relative to the target image. The setting position of the inspection area is corrected by the calculated displacement values and an inspection area is set on the target image based on the corrected coordinates.

Substrate inspection method and apparatus

Growing community of inventors

Kyoto, Japan

Takashi Kinoshita