Hitachi, Ltd.

Elpida Memory, Inc.

Takashi Kanesaka

Wen Zheng Li

Tadanobu Toba

Shuji Kikuchi

Katsunori Hirano

Yuji Sonoda

Masayuki Takahashi

Semiconductor testing equipment according to the present invention comprises: an algorithmic pattern generator for generating a test pattern for testing a memory under test and applying the pattern to the memory under test; a comparator for comparing a response signal from the memory under test and an expected value from tho algorithmic pattern generator; a fail address acquisition part for storing an address of the memory under test (fail address) when a result compared by the comparator is failed; a fail address analysis part for analyzing the failed address and calculating the address to be repaired (repair address); and a cycle-pattern generator for redundancy processing for inserting the address to be repaired into a test pattern and applying the address to the memory under test, so that even when capacity of the semiconductor memory is increased, a fabrication yield thereof is raised by testing the memory after the packaging and by performing the redundancy processing of a defective.

Semiconductor testing equipment, testing method for semiconductor, fabrication method of semiconductor, and semiconductor memory

Growing community of inventors

Kokubunji, Japan

Takashi Kanesaka