Ball Semiconductor Corporation

Other

Disco Corporation

Bell Semiconductor, LLC

Takashi Kanatake

Wenhui Mei

Akira Ishikawa

Karlton David Powell

Kiyoshi Horii

Kin Foong Chan

Wenhui &ldquo;Bill&rdquo; Mei

Roger Privitt

Hiroshi Koshizuka

Shuho Kai

Xiaoqi Zhou

Tashirou Arai

A method for losslessly transmitting data is provided. The data is separated into two or more portions and the second portion is subtracted from the first portion to find a difference. The first portion and the difference are transmitted, and then the second portion is reconstructed by adding the difference to the first portion. The data may comprise two or more images, with each image being a temporally displaced version of the preceding image. Each image may be divided into multiple areas, where the areas on each image correspond to the areas on the other images. A difference may be obtained by subtracting each area of an image from the corresponding area of the preceding image. The first image may then be transferred as a reference image along with the differences, and each image may be reconstructed by adding each difference to the corresponding area of the previous image.

System and method for lossless data transmission

A method for increasing a scan rate in a photolithography system by increasing a unit travel length while maintaining a minimum resolution is provided. The method includes determining the minimum resolution and a pixel spacing distance equal to the unit travel length. The method also includes calculating a window size based on the minimum resolution and the pixel spacing distance. A plurality of windows of the calculated size are established so that a pixel in a first window is offset from a pixel in a second window by the minimum resolution in a first dimension and the pixel spacing distance in a second dimension, and one of the plurality of windows is selected for projection onto a subject.

High resolution point array

A transport system for a spherical object. The transport system has a supply of a first fluid and a passageway for communication of a spherical object in a path between an inlet and an outlet. At least part of the passageway is bounded by a first tube having a first annular wall with at least one opening through the first annular wall. The first tube guides flow of a spherical object in the first fluid from the inlet towards the outlet. The transport system further includes a source of vacuum in communication with the passageway through the at least one opening through the first annular wall. The source of vacuum produces a low pressure region which causes the first fluid in the passageway to be drawn from the passageway through the at least one opening through the first annular wall. The transport system further includes a supply of a second fluid which is in communication with a spherical object moving between the inlet and the outlet.

Transport system for spherical objects and method of using the transport system

A method for scaling a pixel location in a digital photolithography system by rotating a pixel panel is provided. The method determines the angle of rotation of the pixel panel relative to a subject and calculates the original location of the pixel to be scaled. The method calculates the desired location of the pixel and determines the angle through which the pixel panel should be rotated to align the pixel with the desired location in a first dimension. The scan rate of the pixel panel and the subject is altered to align the pixel with the desired location in a second dimension.

Scaling method for a digital photolithography system

A digital photolithography system is provided that is capable of making smooth diagonal components. The system includes a computer for providing a first digital pattern to a digital pixel panel, such as a deformable mirror device (DMD). The DMD is capable of providing a first plurality of pixel elements for exposure onto a plurality of wafer sites. After exposure, the wafer can be scanned a distance less than the site length. The DMD then receives a second digital pattern for exposing a second plurality of pixel elements onto the plurality of sites of the subject. The exposed second plurality of pixel elements overlaps the exposed first plurality of pixel elements. This overlapping allows incremental changes to be made in the image being exposed, thereby accommodating the creation of diagonal components.

System and method for making smooth diagonal components with a digital photolithography system

Disclosed is a method, system, and lense system for performing lithography on a substrate. The system includes a unique lense system for nonplanar substrates. The lense system includes a first lense section for receiving a pattern and producing a concave image of the pattern. The concave image can the be received by a second lense section for producing a nonplanar image of the pattern. The system also includes two light sources and a digital imaging device for projecting and exposing the pattern through the lense section and onto the substrate. Light from the first light source is used for exposing the pattern while light from second light source is used for receiving an alignment image. An image sensor, using the light from the second light source, detects an alignment image from the substrate. The alignment image is used to accommodate the projection of the pattern onto the substrate so that the pattern is properly aligned to the substrate.

System and method for performing lithography on a substrate

A system for performing digital lithography onto a subject is provided. The system utilizes pixel panels to generate pixel patterns. Mirrors are utilized to divert and align the pixel elements forming the patterns onto a subject. A gradient lens system positioned between the panels and the subject simultaneously directs the pixel elements to the subject. The pixel elements may overlapping, adjacent, or spaced as desired. The pixel elements may be directed to multiple surfaces simultaneously. One or more point array units may be utilized in the system to achieve higher resolution.

Lens system for maskless photolithography

Digital photolithography system for making smooth diagonal components

A system and method of utilizing spherical and hemispherical shaped devices to function as an optical switch is disclosed. The optical switch can contain mirrors that turn on and off, or are fixed in place with a movable spherical device. Additionally, the optical switches can contain grating patterns to deflect an optical signal from its original path. The grating patterns can vary in design and pattern to deflect the optical signal in almost any direction, or to not let the optical signal continue. The optical switch can also include photo sensors along the exterior of the sphere or along the reflection device. The optical switch can also include an integrated circuits.

System and method for reflecting and deflecting light utilizing spherical shaped devices

A system and method of optical switching utilizing a reflection device, the switch is disclosed. The system can include: an optical transmission path having an optical transmission medium, an input-side end and a first and a second output-side end; a radiation source associated with said input-side end for emitting a primary optical signal being coupled into said transmission path; a reflection device with the ability to be turned on and off selectively for receiving the primary optical signal and converting the primary optical signal into a secondary, modulated optical signal being reflected and coupled back into the second output-side end when the reflection device is on and wherein the primary optical signal is coupled into the first output-side end when the reflection device is off. The optical switch can contain mirrors that turn on and off, or are fixed in place while the switch is movable.

System and method for refracting and deflecting light utilizing liquid crystal bars and blocks

A photolithography system and method for providing a pattern to a subject such as a wafer is provided. The system includes a pixel panel, such as a digital mirror device or a liquid crystal display, for generating for creating a plurality of pixel elements of the pattern. The pixel elements are simultaneously directed to a first site of the subject by a lense system. The system also includes a manipulator for moving the pixel elements, relative to the subject, to a second site of the subject so that a portion of the second site overlaps a portion of the first site.

Maskless exposure system

A photolithography system and method for providing a mask image to a subject such as a wafer is provided. The mask images are divided into sub-patterns and sequentially provided to a pixel panel, such as a deformable mirror device or a liquid crystal display. The pixel panel converts each sub-pattern into a plurality of pixel elements. Each of the pixel elements is then simultaneously focused to discrete, non-contiguous portions of the subject through a microlense array. The subject and pixel elements are then moved (e.g., one or both may be moved) and the next sub-pattern in the sequence is provided to the pixel panel. As a result, light can be projected on the subject, according to the pixel elements, to create a contiguous image on the subject.

Moving exposure system and method for maskless lithography system

A method and system for transporting objects without causing harmful physical contact is disclosed. The method and system can be used in a manufacturing process for fabricating spherical shaped semiconductor devices. The method cools the spherical shaped device and applies moisture such as de-ionized water. The moisture forms a coat of ice on an outer surface of the cooled spherical shaped device. The spherical shaped device with the coat of ice can then be easily transported, the ice preventing any harmful physical contact to the device. Once the spherical shaped device with the coat of ice has been transported, the device is heated to remove the coat of ice therefrom

Non-damage transport system by ice condensation

A system and method for polishing spherical shaped devices is disclosed. The system includes a carrier and an enclosure. The carrier has two projections so that when a device is placed between the projections, it contacts the carrier at two contact points. The enclosure matingly engages with the carrier so that it also contacts each device at two contact points. A movement system, such as a motor, provides relative movement between the carrier and the enclosure so that the four contact points polish each device. Also, the relative movement moves each device so that the device's entire outer surface is polished by the apparatus.

Quadri-point precision sphere polisher

A system and method for holding and aligning spherical shaped devices is disclosed. The system aligns spherical shaped devices that have at least two hollows formed on an outer surface thereof. The system includes a first knob for aligning with the first hollow and a second knob for aligning with the second hollow. The first knob is relatively small, as compared with the first hollow, while the second knob is relatively large, as compared with the second hollow. The system may also include a third knob for securing the spherical shaped device with the first and second knobs.

Growing community of inventors

Dallas, TX, United States of America

Takashi Kanatake