Anritsu Infivis Co., Ltd.

Takashi Kanai

Hisashi Hayashi

Akihiro Tanaka

Naoya Saito

Itaru Miyazaki

Toshiaki Kikuchi

To correctly acquire image data of an inspected article by preventing a difference in shade between images caused by a difference in position or sensitivity between sensor elements. An X-ray generation source irradiates an inspection region where an inspected article passes with an X-ray. X-ray detection means receives the X-ray passing through the inspection region using a plurality of sensor elements. Image data generation means generates image data of the inspected article from an output of the X-ray detection means. Incidence condition changing means changes two or more kinds of X-ray incidence conditions common for all of the plurality of sensor elements of the X-ray detection means in a state of absence of the inspected article in the inspection region. Correction data generation means acquires correction data that is needed for making a shade of an image uniform for each incidence condition.

X-ray inspection apparatus and correction method for X-ray inspection apparatus

An X-ray inspection device achieves a high cooling effect without using an expensive air conditioner and is excellent in cleaning property. The inside of a first case of an X-ray inspection device is separated into plural cooling partitions by separation walls by the use limit temperature and the like, and heat sources respectively having intrinsic use limit temperature are stored in respective partitions. Because a flow passage of air is set inside the cooling partition so that the heat sources having low use limit temperature are disposed upstream of the heat sources having high use limit temperature, the cooling efficiency is excellent. A heat absorption member of a heat exchange device exists inside the first case, and a heat radiation member exists inside a second case communicating with the external air. Because there is no protrusion of the heat radiation member as the total cases, cleaning property is excellent.

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Kanagawa, Japan

Takashi Kanai