Omron Corporation

Takashi Itakura

Masatoshi Oba

Isamu Kimura

A pressure-detecting chamber , a pressure-directing path and a buffer space are formed on the upper face of a main-body-side substrate as recessed portions, and the upper face of the pressure-detecting chamber is covered with a thin-type diaphragm , and upper faces of the pressure-directing path and the buffer space are covered with a cover substrate . A pressure-introducing unit formed on the lower face of the main-body-side substrate is connected to the lower face of the buffer space . The cross-section of the buffer space is greater than the cross-section of the pressure-introducing unit , and the capacity of the buffer space is greater than the capacity of the pressure-directing path . With this arrangement, it is possible to provide a pressure sensor which can control the response characteristic of the pressure sensor to a pressure change with high precision without causing serious adverse effects on the other characteristics of the pressure sensor, without preventing the miniaturization of the sensor.

Growing community of inventors

Kyoto, Japan

Takashi Itakura