Shimadzu Corporation

Tohoku University

Jeol Ltd.

Japan Atomic Energy Agency

National Institutes for Quantum and Radiological Science and Technology

Takashi Imazono

Hideyuki Takahashi

Masami Terauchi

Hiroyuki Sasai

Masato Koike

To cover a wide wavelength bandwidth, a spectroscopic apparatus uses three varied line spacing concave diffraction gratings Gto G, the corresponding energy ranges for G, G, and Gbeing 50 to 200, 155 to 350, and 300 to 2200 eV, respectively. In the respective wavelength ranges, the diffraction conditions are satisfied. To provide a high throughput and a high resolution in the respective wavelength regions, the incident angles &#x3b1;to &#x3b1;for Gto Gmeasured from the normal line of the diffraction grating are specified to be &#x3b1;&#x3c;&#x3b1;&#x3c;&#x3b1;. Presupposing the normal lines of all diffraction gratings are superposed upon a common normal line, in order to meet &#x3b1;&#x3c;&#x3b1;&#x3c;&#x3b1;, the center positions &#x394;to &#x394;for Gto Gare set on the normal line (as &#x394;&#x3c;&#x394;&#x3c;&#x394;). From Gto G, one diffraction grating can be selected.

Spectroscopic apparatus

Growing community of inventors

Kyoto, Japan

Takashi Imazono