Screen Holdings Co., Ltd.

Takashi Ikeuchi

Hideji Naohara

Takashi Ota

Yasunori Nakamura

A substrate treatment apparatus includes a nozzle, a moving mechanism, a storage portion, and a control portion. The learned model is generated by learning, as learning data, learning target speed information indicating a moving speed of the nozzle and the amount of treatment acquired by executing a treatment on a substrate that is a learning target while causing the nozzle to move at a speed based on the learning target speed information. The control portion causes speed information at the time of treatment to be outputted from the learned model by inputting a target amount of an amount of treatment to the learned model. The control portion controls a moving mechanism such that the nozzle moves at a speed based on the speed information at the time of treatment when the treatment is executed on a substrate that is a treatment target.

Substrate treatment apparatus, substrate treatment method, substrate treatment system, and learning data generation method

A data processing method includes: acquiring time series data; acquiring evaluation values; performing classification; and performing extraction. In the acquiring of the time series data, a plurality of time series data acquired by a substrate processing device are acquired. In the acquiring of the evaluation values, the evaluation values of the plurality of time series data are acquired. In the performing of classification, each of the plurality of time series data is classified into one of a plurality of classifications based on the evaluation value. In the performing of extraction, the time series data corresponding to one of the plurality of classifications is extracted as extracted time series data.

Data processing method, data processing device, and storage medium

A data processing method for processing a plurality of pieces of unit-processing data includes: a reference data changing step of changing reference data (data that is selected from a plurality of pieces of unit-processing data for each unit-element, and to be compared with each piece of unit-processing data); and a reference data extending step of extending new reference data which is the reference data after change by the reference data changing step to a unit-element other than a unit-element for which the reference data has been changed.

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Kyoto, Japan

Takashi Ikeuchi