Average Co-Inventor Count = 2.09
ph-index = 5
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Nikon Corporation (14 from 8,889 patents)
2. Zao Nikon Co., Ltd. (6 from 6 patents)
3. Miyagi Nikon Precision Co., Ltd. (2 from 2 patents)
4. Honda Motor Co., Ltd. (1 from 21,831 patents)
15 patents:
1. 12138990 - Input reception system and control method of input reception system
2. 10151983 - Exposure apparatus and device manufacturing method
3. 9110381 - Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method
4. 9097986 - Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method
5. 9041906 - Immersion exposure apparatus and method that detects liquid adhered to rear surface of substrate
6. 8767168 - Immersion exposure apparatus and method that detects residual liquid on substrate held by substrate table after exposure
7. 8755025 - Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating method
8. 8488101 - Immersion exposure apparatus and method that detects residual liquid on substrate held by substrate table on way from exposure position to unload position
9. 8345216 - Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method
10. 8107055 - Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method
11. 7995186 - Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method
12. 7990516 - Immersion exposure apparatus and device manufacturing method with liquid detection apparatus
13. 7990517 - Immersion exposure apparatus and device manufacturing method with residual liquid detector
14. 7898645 - Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating method
15. 7515249 - Substrate carrying apparatus, exposure apparatus, and device manufacturing method