Asm IP Holding B.v.

Asm Japan K.k.

Takashi Hagino

Masaei Suwada

Masahiro Takizawa

Examples of a substrate transporting system include a substrate transporting robot, a module that houses the substrate transporting robot therein and has an EFEM door, a load port for placing a FOUP having a FOUP door thereon, and a controller for opening the EFEM door while the FOUP door is closed when the FOUP is located at a dock position of the load port.

Substrate transporting system, storage medium and substrate transporting method

A cluster type semiconductor processing apparatus includes a wafer handling chamber having a polygonal base including multiple sides for wafer processing chambers and two adjacent sides for wafer loading/unloading chambers as viewed in a direction of an axis of the wafer handling chamber. An angle A between two adjacent sides of the multiple sides for wafer processing chambers is greater than an angle B which is calculated by dividing 360&#xb0; by the number of the total sides consisting of the multiple sides for wafer processing chambers and the two adjacent sides for wafer loading/unloading chambers.

Growing community of inventors

Kawasaki, Japan

Takashi Hagino