Dainippon Screen Mfg. Co., Ltd.

Screen Holdings Co., Ltd.

Kabushiki Kaisha Kobe Seiko Sho

Takashi Gama

Kimitsugu Saito

Yoshihiko Sakashita

Yusuke Muraoka

Katsumi Watanabe

Shogo Sarumaru

Tomomi Iwata

Ikuo Mizobata

Hisanori Oshiba

Eiji Fukatsu

Jun Munemasa

Hiroyuki Ueno

Nobuyuki Nakano

Yasuo Okuyama

A first score line camera captures an image of one sides of a plurality of tablets being conveyed by a conveyor drum. During transfer from the conveyor drum to a first conveyor belt, all the tablets are turned upside down while their directional properties are maintained. A second score line camera captures an image of opposite side of the tablets being conveyed by the first conveyor belt. Based on image data about both the front sides and back sides of the tablets acquired by the first and second score line cameras, a first ink-jet head performs front-side printing process on a front side of a tablet to conform to a predetermined direction relative to a score line in this front side. The second ink-jet head performs back-side printing process on a back side of a tablet to conform to a direction on the back side same as the predetermined direction.

Tablet printing apparatus and tablet printing method

After subjected to a developing process, a rinsing process and a replacing process in this order in a developing unitA,B, a substrate W wet with an anti-drying solution is wet-transported to a supercritical drying unitby a primary transport robot. The supercritical drying unitperforms a high-pressure drying process (supercritical drying process) in a dedicated manner. Accordingly, by virtue of the presence of the anti-drying solution, the substrate W is effectively prevented from becoming air-dry during the transportation of the substrate W.

Substrate processing method, substrate processing apparatus and substrate processing system

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Kyoto, Japan

Takashi Gama