Organo Corporation

Nec Corporation

Japan Atomic Energy Agency

Other

Rion Company Ltd.

Takashi Futatsuki

Tetsuya Abe

Yukinari Yamashita

Sadamitsu Tanzawa

Koji Yamanaka

Takashi Imaoka

Seiji Hiroki

Yoshinori Tajima

Hidemitsu Aoki

Yoshinori Ono

Akira Suzuki

Hiroshi Sugawara

Masahiko Tatsumi

Kouki Ogura

Masaharu Nakamori

Kaoru Kondo

Toshihisa Hatano

Junichi Watanabei

There is provided a gas separation apparatus for separating a specified gas from a gas to be treated containing a plurality of gases. The gas separation apparatus includes a plurality of serially-connected separation units that separate the specified gas from other gases by using a column, and a suction unit that controls an inside of the column to a reduced pressure. At least two of the plurality of separation units differ from each other in at least one separation condition.

Apparatus and method for separating gas

A flow cellis provided with a flow channelwhich has rounded cornersin section. A measuring sample under high pressure is introduced into the flow channelformed in the flow celland particles existing in the measuring sample are measured. The measuring sample is in a liquid phase, a gaseous phase or a super critical phase above 1 MPa.

Flow cell, flow cell manufacturing method and particle measurement instrument

An apparatus and a method for separating a specified gas from a gas to be treated containing the specified gas comprising at least one ingredient, which comprises allowing the gas to be treated to flow through a column without the use of another gas for transferring the gas to be treated, while keeping the inside of the column packed with a packing material at a reduced pressure. The above apparatus and method can be suitably used for separating a specified gas having a high purity at a low cost.

A unit for separating an exhaust gas containing PFC gases including CFand CFgenerated in a production process, wherein the exhaust gas is concentrated in a concentration device, and then separated chromatographically in a chromatographic separation device using nitrogen as a carrier gas. The chromatographic separation device is packed with molecular sieve 13X or F-9 or the like. The unit is capable of effectively separating CFand CF.

Unit for separating gas

A degassing device (), a hydrogen dissolving device (), and a palladium catalyst column () are provided in that order downstream of a high-purity water production device (), and an impurity removal device () is connected to the exit side of treated water of the palladium catalyst column (). The impurity removal device () removes impurity ions which are eluted into the water to be treated or impurity particulates which mix in with the water to be treated during the treatment in the palladium catalyst column (). The impurity removal device () comprises an ion exchange device () and a membrane treatment device () such as a ultrafiltration membrane device, a reverse osmosis membrane device or the like. By providing an impurity removal device () in this manner, it is possible to remove impurities generated during hydrogen peroxide removal treatment by the palladium catalyst and to prevent degradation in quality of hydrogen-dissolved water.

Hydrogen-dissolved water production apparatus

Using a distillation separator, a gas to be treated is separated into a plurality of gas groups having different boiling points. Then, the specific gases included in each of the plurality of gas groups separated at the first separator and having similar boiling points are separated using a chromatographic separator. In this manner, specific gases can be separated from the gas to be treated containing a plurality of specific gases.

Gas separation apparatus and gas separation method

A discharge gas containing PFC gas including CF and NF generated from a manufacturing process ( ) is adsorbed at an adsorbing device ( ) and then desorbed using nitrogen as a purge gas. A desorbed gas with CF and NF concentrated can be obtained in this manner. The desorbed gas is then supplied to a chromatographic separator ( ) for chromatographic separation with nitrogen as a carrier gas. In this manner, CF and NF within the PFC gas can be separated. In particular, because the gas is once concentrated at the adsorbing device ( ), chromatographic separation of the gas constituents can be efficiently performed. By independently concentrating CF and NF obtained by the chromatographic separation, high purity gas constituents of the PFC gas can be obtained, and reused at the manufacturing process ( ).

Gas separation apparatus

A discharge gas containing PFC gas including CF and NF generated from a manufacturing process ( ) is concentrated at a concentrator ( ) and then chromatographically separated at a chromatographic separator ( ) with nitrogen as a carrier gas. In this manner, CF and NF within the PFC gas can be separated. In particular, because the gas is once concentrated at the concentrator ( ), chromatographic separation can be efficiently achieved. By independently concentrating CF and NF obtained by the chromatographic separation, high purity gas constituents of the PFC gas can be obtained, and reused at the manufacturing process ( ).

A high-purity water producing equipment comprises a primary purification treatment system, a primary deionized water tank, a secondary purification treatment system for producing high-purity water from a primary deionized water, a circulatory system pipe for returning the produced high-purity water to a primary deionized water tank and a branch water feed system branched off from the circulatory system for feeding the high-purity water to a use point. An electrolytic unit for producing the anolyte EIW (electrolytic ionized water) to be catholyte EIW from the electrolysis of the high-purity water is provided as a bypass midway along the circulatory system. The anolyte EIW is added to the circulatory pipe downstream of the branching point toward the use point, when cleaning of units is necessary.

Equipment and process for producing high-purity water

Electric parts including semiconductor substrates, glass substrates and the like are washed with various cleaning solutions. After the cleaning, said parts are cleaned with either anolyte or catholyte electrolytic ionized water (EIW) produced from deionized water.

Method and apparatus for cleaning electronic parts

An electrolytic ionized water (EIW) producing apparatus comprises an anode, a cathode, an electrolyzer which includes an anode chamber, a cathode chamber and an intermediate chamber, inlet lines for supplying an influent water to the three chambers, and outlet lines for discharging effluent water from the chambers. Further, an acidic electrolyte supplying unit is connected to the outlet line from the anode chamber, and an alkaline electrolyte supplying unit is connected to the outlet line from the cathode chamber. The electrolyte supplying units can selectively control at least the dosage level of elelctrolyte(s) to be supplied, the composition and concentration of the electrolyte(s) or pH of EIW after the addition of the electrolyte(s).

Electrolytic ionized water producing apparatus

In an electrolytic ionized water (EIW) producing apparatus, a three-chamber electrolyzer includes an anode chamber, a cathode chamber and an intermediate chamber. An influent such as deionized water is supplied to these chamber via inlet lines. Further an electrolyte supplying units are connected to the inlet lines of the anode chamber and the inlet line of the cathode chamber.

Growing community of inventors

Tokyo, Japan

Takashi Futatsuki