Kaneka Corporation

Takashi Fujibayashi

Yuko Tawada

Toshiaki Sasaki

Disclosed are: a transparent electrode having a zinc oxide film wherein initial characteristics and humidity resistance during long-time use coexist; and a thin film solar cell provided with said electrode. The transparent electrode contains a transparent conductive layer mainly made of zinc oxide. The transparent conductive film preferably has the following characteristics: having surface irregularities; a carrier concentration of 9&#xd7;10cmor less; a crystal structure having a (110) preferred orientation; a ratio of a (110) peak intensity to a (002) peak intensity I(110)/I(002) measured by X-ray diffraction being 50 or more; and a crystallite with a (110) orientation has a size of: 23 nm or more and 50 nm or less, in a planar direction parallel to a substrate; and 30 nm or more and 60 nm or less, in a planar direction perpendicular to the substrate.

Transparent electrode for thin film solar cell, substrate having transparent electrode for thin film solar cell and thin film solar cell using same, and production method for transparent electrode for thin film solar cell

Provided is a thin film photoelectric conversion device with maximized output characteristic, which is achieved by improving an uneven current value of a photoelectric conversion cell caused by an uneven film thickness and an uneven film quality of a photoelectric conversion semiconductor layer, which may be generated in scaling up an integrated-type thin film photoelectric conversion device. The thin film photoelectric conversion device includes: a substrate, a transparent electrode layer, a photoelectric conversion unit, and a back electrode layer. An increasing rate &#x394;Zt of the film thickness Zt of the transparent electrode layer along X and an increasing rate &#x394;Zs of the film thickness Zs of the photoelectric conversion unit along X have different signs, wherein one line segment in a parallel direction to a main surface of the substrate is taken as X&#x2033;.

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Nagareyama, Japan

Takashi Fujibayashi