Keyence Corporation

Takashi Atoro

Kaoru Kanayama

Yuji Akishiba

Yohei Okawa

Naoki Goto

Shinya Asada

Provided are a shape inspection device, a processing device, a height image processing method, and a height image processing program capable of accurately inspecting a measurement object. A profile data generation unit sequentially generates a plurality of pieces of profile data as the measurement object relatively moves in a Y-axis direction. A height image generation unit extracts characteristic points for the respective pieces of profile data, and moves the respective pieces of profile data in a plane intersecting with a Y axis such that the extracted characteristic points are aligned in a line in a direction corresponding to the Y axis. Then, the height image generation unit arranges the moved profile data in a direction corresponding to the Y axis to correct a height image.

Shape inspection device, processing device, height image processing device

Shape inspection device, processing device, height image processing device using characteristic points in combination with correcetion reference regions to correct height measurements

To provide a shape measuring device capable of measuring a surface shape of a measuring object at high speed and with high accuracy in a wide measurement range while configuring the shape measuring device compact. A movable sectionand a balancing sectionare supported by a supporting sectionand reciprocatingly moved by a driving unitwith respect to the supporting sectionin opposite directions each other.

Shape measuring device

There are provided a waveform observing apparatus and the system thereof in which, when a removable storage medium is inserted into the waveform observing apparatus to capture a copy of measured data, a difference copy is made while including the latest measured data collected by the waveform observing apparatus at the time, sixteenth and seventeenth measured data temporarily stored in a buffer memory are filed and stored in the state of being housed in a fourth measured data file, into a body memory. Copies of a third measured data file including part of the difference copy and a new fourth measured data file are written into the USB memory. When the USB memory is inserted into a personal computer, a hard disk of the personal computer comes into a state where its third measured data file is overwritten and stored and the fourth measured data file is newly stored.

Waveform observing apparatus and system thereof

There is provided a waveform observing apparatus, which facilitates management of compressed data and measured data that were created for a reduced display, reduces a calculating amount in making the reduced display, and displays a boundary between stoppage and start of collection of measured data in a visually observable manner, in such a manner that, when a compression ratio is set to the number of pieces of data per display dot, a plurality of compressed data of a compressed-data file for display with a smaller compression ratio than the above used to calculate compressed data, to make a reduced display at the compression ratio after the setting change, final compressed data is created based upon measured data of a fraction at the time of stoppage of sampling, top compressed data is created based upon measured data of a fraction immediately after resuming of the sampling at the time of the resuming.

Waveform observing apparatus

There is provided a waveform observing apparatus with a reduced depth in such a manner that the waveform observing apparatus is one including a terminal board, connecting wiring extending from external equipment, a memory for receiving measured data through the terminal board, to store the measured data, and a display for displaying the measured data in waveform, the apparatus including: a first intra-body substrate, installed in an erect state inside a body frame of the waveform observing apparatus; a plurality of first connectors, provided on the first intra-body substrate; and a measurement module, which is connector-connected to the first connector of the first intra-body substrate, to be installed between the first intra-body substrate and the terminal board, and also includes a measurement circuit, wherein a plurality of measurement modules are detachable in an aligned state with respect to the erect first intra-body substrate.

Growing community of inventors

Osaka, Japan

Takashi Atoro