Nihon Micro Coating Co., Ltd.

Takashi Arahata

Jun Tamura

Jun Watanabe

Takuya Nagamine

Takahiko Kawasaki

Tetsujiro Tada

Moriaki Akazawa

Masaru Sakamoto

A circular polishing pad has grooves formed on the surface in a spiral pattern with its center point offset from the center of the pad. The spiral pattern is an Archimedean spiral pattern or a parabolic spiral pattern. A target object is polished by using such a polishing pad without oscillating the platen to which the polishing pad is pasted or the polishing head that holds the target object.

Method of polishing a target surface

A polishing pad has a resin sheet having a flat surface and abrading particles fixed inside and on the surface of this resin sheet. Its tensile strength is in the range of 30 MPa or greater and 70 MPa or less and preferably in the range of 40 MPa or greater and 60 MPa or less. Its tensile tear elongation is in the range of 50% or less, preferably 20% or less and more preferably 5% or less. The average diameter of the primary particles of the abrading particles is in the range of 0.005 &#x3bc;m or greater and less than 0.5 &#x3bc;m, and preferably in the range of 0.005 &#x3bc;m or greater and 0.2 &#x3bc;m or less. The content of the abrading particles fixed to the resin sheet is 10 volume % or greater and 50 volume % or less, or preferably 10 volume % or greater and 24 volume or less.

Polishing pad, method of producing same and method of polishing

Growing community of inventors

Akishima, Japan

Takashi Arahata