Kabushiki Kaisha Nihon Micronics

Tanaka Kikinzoku Kogyo K.k.

Takashi Akiniwa

Satoshi Narita

Kazuhito Hamada

Kazuya Goto

Takeshi Kondo

Toshinori Omori

Shintaro Abe

Takeki Sugisawa

Yasuaki Osanai

Maki Watanabe

An object is to enhance the durability of substrates of a probe substrate and/or the probe substrate and a member to be joined. A probe substrate according to the present disclosure includes: a plurality of electrical contactors respectively brought into electrical contact with a plurality of electrode terminals of a member to be inspected, a joint portion for a member to be joined is provided on one or each of a first surface and a second surface of the probe substrate and the member to be joined is joined to the joint portion with a metal layer that includes, in a metal component, at least 70 atomic percent or more of a transition metal and that is formed by sintering, and/or in a joining surface between a plurality of substrates of the probe substrate, the substrates are joined together with the metal layer formed by sintering, in the metal layer formed by sintering, a plurality of organic component parts and/or voids formed by heating an adhesive composition including a thermoplastic resin are left and the organic component parts and/or the voids included in the metal layer formed by sintering have 5 to 80 area percent in a vertical cross section of the metal layer formed by sintering.

Probe substrate and electrical connecting apparatus

An embodiment of the invention provides a method for manufacturing a probe sheet in which a probe tip can be arranged at a predetermined accurate position without the need for troublesome positional adjustment operations of the probe tip in coupling operations of each contactor and a probe sheet main body. It is a method for manufacturing a probe sheet comprising a probe sheet main body having conductive paths and a plurality of contactors formed to be protruded from one surface of the probe sheet main body and connected to the conductive paths. The manufacturing method comprises the steps of forming a plurality of the contactors on a base table by sequentially depositing on the base table metal materials for a plurality of contactors from their respective probe tips toward base portions with use of a photolithographic technique, forming on the base table the probe sheet main body to be coupled with the base portion of each contactor held on the base table, and separating the contactors from the base table integrally with the probe sheet main body.

Method for manufacturing probe sheet

An embodiment of an electrical connecting apparatus comprises a support board having an upper surface and a lower surface, a block having an attachment surface directing downward and attached to the support board in a state where at least the attachment surface is located below the support board, a flexible circuit board having a contactor area in which a plurality of contactors are arranged and an outside area around the contactor area and attached at part of the outside area to the lower surface of the support board in a state where at least the contactor area is opposed to the attachment surface of the block, and a reference mark member having a lower end surface and a reference mark for positioning provided on the lower end surface and attached to the block in a state where the lower end surface is exposed to the lower side of the circuit board. Accordingly, the measurement accuracy of the probe tip position is heightened.

Electrical connecting apparatus

An embodiment of a probe sheet enabling to restrict misalignment of the posture of each contactor accurately positioned on a probe sheet main body caused by deformation of the probe sheet main body is provided. The probe sheet comprises a probe sheet main body having a flexible insulating synthetic resin film and conductive paths buried in the synthetic resin film and a plurality of contactors formed to be protruded from a contactor area on one surface of the probe sheet main body and connected to the conductive paths. In the probe sheet main body is buried a plate-shaped member having higher rigidity than that of the synthetic resin film and restricting deformation of the contactor area.

Probe sheet and electrical connecting apparatus

Growing community of inventors

Aomori, Japan

Takashi Akiniwa