Nippon Shokubai Co., Ltd.

Intra-cellular Therapies, Inc.

Tohku University

Takashi Abe

Shin-ya Imoto

Tatsuhiko Akiyama

Morihiro Kitamura

Hikaru Takahashi

Takehiko Morita

Peng Li

Robert E Davis

Lawrence P Wennogle

Akira Nishimura

Akinobu Teramoto

Yuhei Yamamoto

Takuya Kamiyama

Hideaki Maruyama

Yoshinobu Shiba

Hironori Yamashita

Graham Buckton

Mark Hooper

Chiho Mizushima

Tomonori Shinokura

Masahiro Takasuga

A method for preparing a silicon nitride film with a high deposition rate and a reduced damage to the substrate and/or the underlying layer formed under the silicon nitride film. The method for preparing a silicon nitride film contains the steps of irradiating a nitride with an ultraviolet light, and contacting the nitride irradiated with the ultraviolet light and a hydrogenated cyclic silane represented by a general formula SiH, wherein n is 5, 6, or 7.

Method for producing silicon nitride film

At least one embodiment of the present disclosure provides a hydrogenated silane composition containing cyclohexasilane of a cyclic hydrogenated silane having high storage stability. The at least one embodiment of the present disclosure relates to a hydrogenated silane composition, wherein a content ratio of normal hexasilane and silylcyclopentasilane to cyclohexasilane is 0.0020 or less on a mass basis.

Hydrogenated silane composition

At least one embodiment of the present disclosure provides a hydrogenated silane composition containing a cyclic hydrogenated silane having high storage stability. The at least one embodiment of the present disclosure relates to a hydrogenated silane composition, wherein a content ratio of a linear hydrogenated silane having Si atoms of 5 or less to a cyclic hydrogenated silane having Si atoms of 5 to 7 is 0.009 or less, wherein the cyclic hydrogenated silane comprises at least cyclohexasilane, and further comprises at least one cyclic hydrogenated silane having a branched silyl group selected from silylcyclopentasilane and silylcyclohexasilane, and wherein a content ratio of a total of the silylcyclopentasilane and the silylcyclohexasilane to the cyclic hydrogenated silane having Si atoms of 5 to 7 is 10 ppb or more on a mass basis.

A process for producing a cyclic hydrogenated silane compound comprising: a decomplexation step of contacting a salt of a cyclic halosilane compound with a Lewis acid compound to react, thereby obtaining a cyclic halosilane compound; and a reduction step of contacting the cyclic halosilane compound with a metal hydride to reduce the cyclic halosilane compound, thereby obtaining a cyclic hydrogenated silane compound.

Process for producing cyclic hydrogenated silane compound

High purity cyclohexasilane and a method for increasing the purification efficiency thereto are provided. The method for producing cyclohexasilane of the present invention is characterized in that, in distilling crude cyclohexasilane to obtain purified cyclohexasilane, the absolute pressure during distillation is set to 2 kPa or less, and the heating temperature of crude cyclohexasilane is set to 25 to 100&#xb0; C. The cyclohexasilane of the present invention contains pure cyclohexasilane at a rate of 98% by mass or more and 100% by mass or less.

Cyclohexasilane

A neutral complex of a cyclic silane characterized in being represented by the general formula [Y][SiZH]. (In the formula: Y is at least one kind of coordination compound selected from a group consisting of (1) compounds represented as XR. (when Xis P, P&#x2550;O or N, n=3 and each Rrepresents a substituted or unsubstituted alkyl group or aryl group and Rs are the same or different; when Xis S, S&#x2550;O or O, n=2 and each Rrepresents the same group as described above and Rs are the same or different; and the number of amino groups in XRis 0 or 1), and (2) at least one heterocyclic compound selected from the group consisting of substituted or unsubstituted N&#x2014;, O&#x2014;, S &#x2014;or P&#x2014; containing heterocyclic compounds that have an unshared electron pair in the ring (the number of amino groups in the heterocyclic compound is 0 or 1), each Z represents a halogen atom of any of Cl, Br, I and F and Zs are the same or different, l is 1 or 2, m is 3 to 8, and a is 0 to m.

Neutral complex of cyclic silane, manufacturing method therefor, and method for manufacturing cyclic hydrogenated silane or cyclic organic silane

The present invention relates to crystals of (6aR,9aS)-5,6a,7,8,9,9a-hexahydro-5-methyl-3-(phenylamino)-2-((4-(6-fluoropyridin-2-yl)phenyl)methyl)-cyclopent[4,5]imidazo[1,2-a]pyrazolo[4,3-e]pyrimidin-4(2H)-one, and methods of making and using such crystals.

Free base crystals

Method for producing cyclohexasilane

An object of the present invention is to provide a production method that can efficiently produce a cyclic silane compound or a salt thereof with a high yield and to provide a novel salt having a cyclic silane dianion that is easy to handle and a cyclic silane dianion salt-containing composition. The method for producing a cyclic silane compound or a salt thereof of the present invention includes the step of allowing a halosilane compound to react in the presence of at least one of a phosphonium salt and an ammonium salt, and a compound represented by a specific formula.

Method for producing cyclic silane compound or salt thereof, salt having cyclic silane dianion, and cyclic silane dianion salt-containing composition

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Osaka, Japan

Takashi Abe