Average Co-Inventor Count = 10.47
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (2 from 10,381 patents)
2 patents:
1. 8859422 - Method of forming copper wiring and method and system for forming copper film
2. 8399353 - Methods of forming copper wiring and copper film, and film forming system