Canon Kabushiki Kaisha

Takao Yokomatsu

Mikio Nakasugi

Junji Isohata

Hironori Yamamoto

Mitsuaki Seki

Mahito Negishi

Hideyuki Nishida

Shuuichi Sato

Seiichi Hata

Akira Shimokohbe

Ken Meisho

Yuichi Someya

Motomu Furukawa

Dongming Sun

Sheng Wang

In a piezoelectric vibration type force sensor according to the present invention, vibration is restricted by a friction force between a piezoelectric body and a restricting member, and hence a range of sensing forces can be expanded compared with a case in which the vibration is restricted directly from a direction that is the same as an vibration direction. A conventional structure, in which a lead wire is soldered directly for electrically connecting the piezoelectric body to an external control circuit, causes a restriction of the vibration due to a solder attached to the piezoelectric body, resulting in narrowing the sensing range. Using the piezoelectric vibration type force sensor, the range of sensing forces can be expanded by making a state in which conducting portions of the piezoelectric body and the restricting member are not fixed but contact with each other for keeping electric conductivity.

Piezoelectric vibration type force sensor

A cylindrical piezoelectric element is arranged to share an axis with a cylindrical vibrator having different diameters at central and end portions to fix the vibrator forming a gap at the central portion. Vibration voltages are applied across first electrodes on the piezoelectric element and the vibrator, namely, a second electrode, to vibrate the vibrator and bring a wave front of a traveling wave into contact with a tubular member, i.e., a supporting member fitted to the vibrator. Friction at a contact portion of the vibrator moves a mover including the vibrator and the piezoelectric element in an axial direction of the tubular member. By amplifying the vibration amplitude using the vibrator provided separately from the piezoelectric element, a small actuator capable of performing high-speed driving is realized.

Actuator

An apparatus for drawing a fine circuit pattern on a wafer, includes a radiation beam generating head for generating and emitting radiation beams with which the wafer is to be patternwisely exposed; a first moving system for moving the beam generating head in a first direction; and a second moving system for moving the wafer at least in a second direction, substantially perpendicular to the first direction, while holding the wafer by attraction.

Fine circuit pattern drawing apparatus and method

A conveyor device for alignment in which minutely displaceable members and hydraulic fluid supply pads are disposed between a slide and a guide. The relative position of the slide and the guide is adjusted by controlling the dimension of the minutely displaceable members.

Conveyor device for alignment

A static pressure bearing device for relatively supporting, in an ambience, an object for relative movement, comprising a fluid supplying portion for supplying a fluid to at least a portion of a surface of the object, and a suction pump for drawing the fluid supplied to the portion of the surface of the object by the fluid supplying portion, so as to substantially prevent leakage of the fluid into the ambience.

Static pressure bearing

There is disclosed a static pressure bearing which is provided with plural fluid supplying pads for supplying a fluid in a gap between a guide member and a bearing member whereby the ratio of the change of pressure of the fluid supplied from the pads to the change in the gap is regulatable.

Growing community of inventors

Yokohama, Japan

Takao Yokomatsu