Olympus Optical Company, Ltd.

Takasago Thermal Engineering Co., Ltd.

Denso Corporation

Fujikoki Corporation

Bosch Packaging Technology K.k.

Takao Okada

Tsugiko Takase

Hiroshi Kajimura

Shuzo Mishima

Akitoshi Toda

Hirofumi Miyamoto

Yoshiyuki Mimura

Hideo Tomabechi

Toshihito Kouchi

Akira Yagi

Seizo Morita

Kimihiko Nishioka

Nobuo Mikoshiba

Soichiro Sakata

Hisanari Shimazu

Takeaki Nakamura

Hiroko Ohta

Hiroko Ota

Hiroyuki Yamamoto

Kazuo Nakamura

Hideo Adachi

Hideto Takahashi

Katsumi Sato

Takanori Yoshida

Susumu Sato

Takeo Takahashi

Takashi Tanaka

Masahiko Kato

Osamu Hishinuma

Yuzo Nakamura

Hiroatsu Yamada

Shin Yoshida

Makoto Sudo

Masamichi Morimoto

Yasushi Satoh

Yoshimitsu Enomoto

Toshiaki Matsuzawa

Yasuhiro Sugawara

Kosuke Takeshita

Tsugio Takase

Haruo Ogawa

Takaaki Takenobu

Kunio Hori

A pulsation damper includes an upper diaphragm, a lower diaphragm configured to form a sealed space having a predetermined pressure with the upper diaphragm, in which an inert gas is filled; and a deformation suppressing member formed of an elastic material, and comprising an inner cylindrical portion, and an extension portion extending from a center portion on an outer peripheral surface of the inner cylindrical portion such that the extension portion extends outward from a center axis of the inner cylindrical portion, wherein the deformation suppressing member is arranged inside the sealed space such that an outer periphery of the extension portion abuts against inner walls of the upper diaphragm and the lower diaphragm.

Pulsation damper

An inspection device includes an illumination unit for illuminating a subject having a bright part and a dark part darker than the bright part, a light path dividing unit for dividing object light from the subject illuminated by the illumination unit into first light and second light that pass through different light paths, a filter for reducing the amount of the first light having passed through the light path dividing unit, a first imaging unit in which the first light having passed through the filter forms an image, a second imaging unit in which the second light having passed through the light path dividing unit forms an image, and an inspection unit for inspecting whether a defect is present in the subject based on information of the bright part taken by the first imaging unit and information of the dark part taken by the second imaging unit.

Inspection device and inspection system

The present invention relates to an air filter having an inorganic material layer in which the following adsorbent is fixed on the surface of the supporter using powder of an inorganic substance as a binder. That is, the adsorbent is prepared by impregnating a salt of an inorganic acid to powder of an inorganic substance consisting of at least one of diatom earth, silica, alumina, a mixture of silica and alumina, aluminum silicate, activated alumina, porous glass, activated clay, activated bentonite, or synthetic zeolite. The air filter according to the present invention can adsorb and remove both of gaseous basic impurities and gaseous organic impurities, thus making a very effective filter for manufacturing semiconductor and LCD.

Air cleaning filter, process for preparing the same, and high-level cleaner

A method for detecting a target nucleic acid molecule hybridized with a nucleic acid probe, comprising the steps of: (a) hybridizing a target nucleic acid molecule having a specific sequence to be detected in a sample with a nucleic acid probe having a sequence complementary to the sequence of the nucleic acid molecule, the nucleic acid probe being selected such that the nucleic acid molecule and the probe are partially hybridized to represent a linear conformation in a hybridized region and to represent, in an non-hybridized region, a unique structure inherent to its nucleotide sequence; (b) measuring the conformation, structure and length of the nucleic acid molecule obtained in step (a); and (c) on the basis of the measurement data obtained in the step (b), detecting the nucleic acid containing both of the linear conformation and the unique structure, thereby detecting the nucleic acid molecule hybridized with the probe.

Method for detecting a hybridized nucleic acid molecule

Air cleaning apparatus, air filter and method for manufacturing the same

A cantilever has a probe on one side of the end portion and a mirror on the opposite side. The cantilever is fixed to a support member via a piezoelectric element. A semiconductor laser situated above the mirror has a reflection cleavage plane and constitutes a Fabry-Perot resonator between the mirror and the reflection cleavage plane. The output from the resonator varies in accordance with the amount of displacement of the end portion of the cantilever, that is, the surface configuration of the sample. This variation is detected by a detector via a photodetector. A control circuit controls a driving voltage applied to an XYZ-scanner so as to cancel the variation of the output from the resonator, thereby keeping constant the distance between the tip of the probe and the surface of the sample. The driving voltage provides height data of the sample surface. The driving voltage, along with a position signal relating to the sample surface output from the XYZ-scanner, is supplied to an image forming unit. The image forming unit generates a three-dimensional image representing the surface configuration of the sample, on the basis of the input voltage and signal.

Atomic probe microscope

A scanning tunneling potentio-spectroscopic microscope, includes a conductive probe and a circuit for selectively applying one of first, second and third bias voltages to a sample. A tunnel current flowing between the probe and sample is detected, and a tunnel current signal is produced upon detection thereof. A servo circuit controls a distance between the probe and sample on the basis of the tunnel current signal by producing a servo signal as a feedback signal. A hold circuit switches the servo circuit between operating and non-operating states. Configuration data on a surface of the sample is obtained, on the basis of the servo signal, with the first bias voltage applied to the sample and with the servo circuit in the operating state. A first dependence of the tunnel current on the bias voltage is obtained, from the tunnel current signal and the second bias voltage, with the second bias voltage applied to the sample and with the servo circuit in the non-operating state. A second dependence of the tunnel current on the bias voltage is obtained from the tunnel current signal and the third bias voltage, with the third bias voltage applied to the sample and with the servo circuit in the non-operating state. Electron state data is obtained on the basis of the first dependence, and potential data is obtained on the basis of the first and second dependencies.

Scanning tunneling potentio-spectroscopic microscope and a data

A scanning tunneling microscope has an STM unit including a probe for scanning the surface of an object. The STM unit has at its outer peripheral surface a cylindrical enclosing member extending towards an object table. When the object is observed, the object table is elevated or the STM unit is lowered, so that the enclosing member is urged upon the table. The table and the STM unit constitute one body. As a result, relative movement between the object and the probe can be prevented, and also influence due to vibration can be prevented. In addition, the enclosing member isolates the object and the probe from the outside space, whereby electric noise, magnetic noise, sound noise and air flow are shielded. Thus, the influence due to external vibration can be reduced, and the stability is enhanced.

Scanning tunneling microscope

A scanning probe microscope comprises a cantilever having a conductive probe positioned near a sample, an actuator for moving the sample to and away from the probe, a circuit for applying a bias voltage between the probe and sample to produce a tunnel current therebetween, a circuit for detecting the produced tunnel current, a circuit for detecting the amount of displacement of the probe resultant from interatomic forces acting between atomics of the probe and sample, thereby producing signals, a circuit for providing the actuator for feedback in response to the output signals from the circuit to retain constant the distance between the probe and sample, thereby causing the actuator to move the sample, a circuit for forming an STS image data from the detected tunnel current, a circuit for forming an STM image data from the detected tunnel current, and a circuit for forming an AFM image data. Thus, the STS, STP and AFM images are separately obtained simultaneously.

Scanning probe microscope having cantilever and detecting sample

An STM memory medium comprising a substrate whose surface is smooth or even, a first insulating layer formed at a predetermined depth in the substrate by implanting first ion atoms from the smooth surface of the substrate into it under a certain condition, and a second insulating layer formed adjacent to the first insulating layer and at another predetermined depth in the substrate by implanting second ion atoms from the smooth surface of the substrate into it under another certain condition.

STM memory medium

An atomic force microscope comprises a probe having a sharply-pointed tip end. The probe is supported on the free end portion of a cantilever and is close to the surface of a specimen. When an interatomic force is produced, the cantilever is deformed, and the probe is displaced. The displacement of the probe is detected by an optical system. A light beam emitted from a light source is collimated by a lens, and reflected by a polarized beam-splitter, and also by a half-mirror. Then, the light beam passes through a quarter wavelength plate and an objective lens, such that the light is converged on the cantilever. The reflected light beam from the cantilever returns along the same optical path and passes through the splitter. The light beam is divided into two light beams at the splitter. These two light beams are reflected by respective prisms and are then incident on respective photodetectors. These photodetectors detect the displacement of the probe.

Atomic force microscope

A lithography apparatus is provided with an SXM base, which has a plurality of cantilevers movably supporting probes at their free ends, respectively. The SXM base is secured to a mirror base by a support arm via inchworm devices, such that it faces a silicon wafer placed on a wafer stage. The silicon wafer has an alignment pattern formed thereon, while the SXM base has a reference alignment pattern formed thereon which is similar to the alignment pattern. A voltage is applied to the probes at a predetermined point of time under the control of a controller while a gas containing a film-forming material is being supplied onto the wafer, whereby the film-forming material is adsorbed in a desired portion of the surface of the wafer.

Lithography apparatus using scanning tunneling microscopy

Probe for a scanning tunneling microscope

A light beam from a light source is divided into two beams by a polarized beam splitter. The beam is reflected by a mirror, is converted into a P-polarized beam by a 1/4 .lambda. plate, passes through the beam splitter, is reflected by prisms, passes through a polarized beam splitter, is reflected by a mirror, is converted into a S-polarized beam by a 1/4 .lambda. plate, is reflected by the beam splitter, and is finally incident on a detector. The beam is converted into a S-polarized beam by a 1/2 .lambda. plate, is reflected by a polarized beam splitter, is reflected by the upper face of a cantilever supporting a probe, passes through a polarized beam splitter, is reflected twice in a prism, passes through the beam splitter, is reflected again by the cantilever, is converted into a S-polarized beam by a 1/4 .lambda. plate, is reflected by the beam splitter, is converted into a P-polarized beam by a 1/2 .lambda. plate, passes through the beam splitter, and is finally incident on the detector. The detector outputs the displacement of the cantilever from the optical path difference of the beams Lr and Lt.

Technique for canceling the effect of external vibration on an atomic

Growing community of inventors

Hachioji, Japan

Takao Okada