Mitsubishi Denki Kabushiki Kaisha

Mitsubishi Electric Corporation

Takao Ohara

Satoshi Nishida

Koji Funaoka

Shoichiro Hara

Masahiko Uno

Hirohisa Nishino

In an inspection of a semiconductor wafer for a defect, when infrared light passing through a semiconductor wafer is imaged by a camera and an inspection is conducted using the image, a problem that halation occurs in the camera due to light leaking from the side of the inspection object, which makes it impossible to conduct an inspection at the periphery portion occurs. An inspection object is irradiated by an infrared light source, and transmitted light is imaged by an infrared camera to be conducted. With the use of mask means that secures a clearance from the end portion on the outer side, it is possible to inspect on the peripheral portion. Also, as means for supporting the object, plural sets of those configured to be capable of evacuating are used, and by allowing the plural sets to evacuate alternately, it is possible to inspect across the entire surface.

Image inspection device and image inspection method using the image inspection device

Plate springs as coupling members can absorb deformation of an oscillator case due to heat and do not transmit the deformation to two optical bases constituting an optical resonator, and it is thereby possible to maintain an appropriate positional relation between the optical cases. A harmful deformation force is produced due to imperfect alignment deformation of bellows each of which is connected between the oscillator case and each optical base. The plate springs can also suppress the force acting on the two optical bases, and it is thereby possible to keep a laser optical axis of a laser beam to be a fixed position.

Orthogonally excited-type laser oscillator

One optical base is provided on each side of a housing that houses a laser oscillator. Optical parts of an optical resonator are fixed to the optical bases. The optical bases are fixed to each other, independently from the housing, by supporting rods. A plate spring and two dampers fix the respective optical base to respective end of the housing. The plate spring bends in the direction of the laser beam when the housing deforms. The damper attenuates oscillation generated due to the displacement of the housing.

Growing community of inventors

Tokyo, Japan

Takao Ohara