Mitutoyo Corporation

Takao Ishitoya

Yoshiyuki Omori

Tsukasa Kojima

Fumihiro Takemura

Toshihiro Kanematsu

Hiroyuki Hidaka

Hiroomi Honda

Hideki Mishima

An interaxis-angle correction method comprising: a reference sphere measurement step of scanning, with the sensor, a reference sphere located on the table, in the measurement-axis direction at a translation-axis-direction position on the reference sphere to acquire measurement-axis-direction contour information, and performing the scanning at a plurality of different translation-axis-direction positions on the same reference sphere, with the table being linearly translated; a peak detection step of detecting a peak point in the measurement-axis-direction contour information, and performing the detection for each set of measurement-axis-direction contour information; an error information acquisition step of obtaining information related to the inclination of an actual straight line based on each peak point with respect to an ideal straight line; a correction information acquisition step of obtaining correction information for correcting a measurement error related to the position in the measurement-axis direction, caused by the inclination of the actual straight line; and a correction step.

Interaxis angle correction method

A surface texture measuring apparatus allowing effects of vibration disturbance to be removed and a highly accurate measurement to be achieved. The surface texture measuring apparatus is further provided with a small surface texture measuring apparatus, which detects the amount of vibration of a workpiece while maintaining a detecting device in contact with the surface of the workpiece without moving the device along the workpiece. The main surface texture measuring apparatus conducts measurement with a high accuracy based on the detected unevenness value of the surface of the workpiece and on the amount of vibration detected by the small surface texture measuring apparatus.

Surface texture measuring apparatus

An object is mounted and rotated on a rotary table. An encoder outputs a rotary angle signal corresponding to the rotary angle of the rotary table. A detection head outputs a displacement detection signal while tracing the surface of the object. The detection head moves within a plane including the axis of rotation, so as to oppose the outer or inner surface of the object. When the detection head is opposed to the inner surface of the object, the positive and negative signs of the displacement detection signal is reversed, while at the same time a 180.degree. angle is added to the rotary angle signal. By utilizing the reversed displacement detection signal and the corrected angle correction signal, the obtained result can be displayed through a displaying processing common to the processing for the outer surface.

Roundness measuring apparatus

Growing community of inventors

Kawasaki, Japan

Takao Ishitoya