Nippon Telegraph and Telephone Corporation

Takanori Kiyokura

Katsuyuki Machida

Toshishige Shimamura

Hiromu Ishii

Masami Urano

Yasuyuki Tanabe

Yuji Uenishi

An optical switch device includes at least an optical switch element and driving control circuit. In the optical switch element, a fixed electrode portion is arranged, via a dielectric layer, on a semiconductor substrate on which an integrated circuit is formed. A mirror structure has a plate-shaped movable portion arranged above the fixed electrode portion while opposing the fixed electrode portion. A reflecting portion is formed at least at part of the movable portion to reflect light. A support member is fixed around the fixed electrode portion on the semiconductor substrate via a dielectric layer and supports the mirror structure. The driving control circuit is incorporated in the integrated circuit to drive the optical switch element by applying a predetermined potential to the movable portion and fixed electrode portion.

Growing community of inventors

Kanagawa, Japan

Takanori Kiyokura