Panasonic Intellectual Property Management Co., Ltd.

Takanori Aoyagi

Hitoshi Yoshida

Kazuo Goda

Takahiro Shinohara

Takeshi Mori

Hiroshi Nakatsuka

Keisuke Kuroda

Hiroyuki Aizawa

Hideki Ueda

Kensaku Yamamoto

Shinichi Kishimoto

Masako Yamaguchi

Yuki Maegawa

Takuya Kajiwara

Fuyuto Nakamura

Ryosuke Meshii

Rie Okamoto

Chunzhi Dong

Docking station

A physical quantity sensor includes a substrate, an anchor portion, a surrounding portion, a detecting element, a moving portion, and a beam portion. The anchor portion is formed on the same side as a principal surface of the substrate and fixed to the substrate. The surrounding portion is formed on the same side as the principal surface of the substrate and surrounds the anchor portion. The detecting element detects a physical quantity as a target of detection. The moving portion is provided with at least a part of the detecting element, formed on the same side as the principal surface of the substrate, and connected to the surrounding portion. The beam portion is formed on the same side as the principal surface of the substrate and connects the anchor portion and the surrounding portion together.

Physical quantity sensor

A connection assembly includes a sensor substrate, a layer substrate coupled to the sensor substrate so as to face an upper surface of the sensor substrate, and a wire connected between the sensor substrate and the layer substrate. The sensor substrate includes first and second projections provide on the upper surface of the sensor substrate and extending in an extension direction along the upper surface of the sensor substrate. The wire has a first end sandwiched between the layer substrate and the first projection, and a second end sandwiched between the layer substrate and the second projection. The connection assembly provides reliable connection.

Connection assembly

A wiring-buried glass substrate includes a glass substrate and a first wiring. The glass substrate includes a first surface, a second surface perpendicular to the first surface, and a third surface facing the first surface. The first wiring includes a first pillar portion and a first beam portion. The first pillar portion extends in a first direction perpendicular to the first surface of the glass substrate. The first beam portion is connected to a first surface of the first pillar portion and extends to a second direction perpendicular to a second surface of the glass substrate. The first wiring is buried in the glass substrate. The first surface of the first beam portion is exposed from a third surface of the glass substrate.

Wiring-buried glass substrate, and inertial sensor element and inertial sensor using same

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Osaka, Japan

Takanori Aoyagi