Seiko Epson Corporation

Takanobu Matsumoto

Toshiyuki Kamiya

Hiroki Kawai

Hideaki Oka

Akinori Yamada

Yasuhiro Shimodaira

A force detection device includes a charge output element that outputs charge in accordance with a received external force, a conversion and output circuit, having a first switching element and a first capacitor, which converts the charge into a voltage and outputs the voltage, a compensation signal output circuit, having a second switching element and a second capacitor, which outputs a compensation signal, and an external force detection circuit that detects an external force on the basis of the voltage which is output from the conversion and output circuit and the compensation signal which is output from the compensation signal output circuit. The capacitance of the second capacitor is smaller than the capacitance of the first capacitor.

Force detection device, robot, and moving object

A sensor device includes a package, a sensor element that is disposed in the package, and a lid that seals the package, in which the sensor element includes a contacting surface that comes in contact with the lid, the package includes a joint surface which is joined to the lid, and the contacting surface and the joint surface are not on the same flat surface.

Sensor device, sensor module, robot and method of manufacturing sensor device

A sensor module includes a first member including a first recess in which a piezoelectric element including an electrode is arranged, a second member joined to the first member, a first plate in contact with the second member, a second plate in contact with the first member, and a fastening section configured to fasten the first plate and the second plate. A first projection projecting toward the second member is provided on the first plate. The internal height of the first recess of the first member is larger than the height of the piezoelectric element. The piezoelectric element is in contact with the second member.

Sensor module, force detecting device, and robot

A sensor element is formed by, when an &#x3b1; axis, a &#x3b2; axis orthogonal to the &#x3b1; axis, and a &#x3b3; axis orthogonal to the &#x3b1; axis and the &#x3b2; axis are set, laminating piezoelectric substrates and electrodes in the &#x3b3; axis direction. The sensor element includes connecting sections arranged such that a part of external sections of the electrodes aligns with a part of external sections of the piezoelectric substrates. The connecting sections are arranged not to align with one another in a direction of the &#x3b3; axis. Conductors that electrically connect the connecting sections and external connecting sections are formed along outer peripheral sections of the piezoelectric substrates.

Sensor element, force detecting device, and robot

A piezoelectric substrate includes vibrating arms, a base portion to which one end portion of each vibrating arm is connected, spindle portions formed in the other end portion of each vibrating arm, formed to have a large width, and having first groove portions formed therein, and second groove portions that are formed along the resonator center line of each vibrating arm, and flexure-torsional combined resonator is excited. A piezoelectric resonator element has flexural resonator of flexure-torsional combined resonator that is excited as its principal resonator and sets the cutting angle of the piezoelectric substrate, the widths and the depths of the first groove portion and the second groove portion, and the thickness of the vibrating arm such that the frequency-temperature characteristics represent third-order characteristics with respect to the temperature.

Piezoelectric resonator element, piezoelectric resonator, piezoelectric oscillator, resonator gyro element, resonator gyro sensor, and electronic apparatus

Growing community of inventors

Minowa, Japan

Takanobu Matsumoto