Stella Chemifa Corporation

Stella Chemifa Kabushiki Kaisha

Takanobu Kujime

Hirohisa Kikuyama

Keiichi Nii

Tadahiro Ohmi

Masayuki Miyashita

Masahide Waki

Hideki Nakashima

Hiroto Izumi

Rui Hasebe

Hitoshi Tsurumaru

Kanenori Ito

Provided is a fine-processing agent which, when fine-processing a laminated film stacked at least with a silicon dioxide film and a silicon nitride film, can selectively fine-process the silicon dioxide film. Also provided is a fine-processing method utilizing the fine-processing agent. The fine-processing agent is characterized by including: (a) 0.01-15.0 weight % hydrogen fluoride and/or 0.1-40.0 weight % ammonium fluoride, (b) water, and (c) 0.001-10.00 weight % water-soluble polymer selected from among a group consisting of acrylic acid, ammonium acrylate, acrylic acid ester, acrylamide, styrenesulfonic acid, ammonium styrenesulfonate, and styrenesulfonic acid ester.

Fine-processing agent and fine-processing method

A fine treatment agent according to the present invention is a fine treatment agent for the fine treatment of a multilayer film, including a tungsten film and a silicon oxide film comprising at least one from among hydrogen fluoride, nitric acid, ammonium fluoride and ammonium chloride. Thus, a fine treatment agent which makes fine treatment on a multilayer film, including a tungsten film and a silicon oxide film, possible by controlling the etching rate and a fine treatment method using the same can be provided.

Fine treatment agent and fine treatment method using same

A stainless steel with a passive state fluorinated film formed thereon, which is easy to construct and does not produce particles even when it is welded, and a device using the same. The stainless steel does not cause leakage even when said film is formed on a sealing surface of a joint and a valve seat surface. The stainless steel is characterized in that at least a part of the surface coated with a passive state fluorinated film not thicker than 190&angst; consisting of a metal fluoride as a main component.

Stainless steel having passive fluoride film formed thereon and equipment manufactured therefrom

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Sakai, Japan

Takanobu Kujime