Kabushiki Kaisha Toshiba

Toshiba Memory Corporation

Kioxia Corporation

Takamitsu Ishihara

Koichi Muraoka

Yasushi Nakasaki

Tadashi Kai

Junichi Ito

Tadaomi Daibou

Hiroki Kawai

Hideaki Aochi

Fumitaka Arai

Hiroshi Watanabe

Riichiro Shirota

Yoshiaki Asao

Masato Koyama

Akira Nishiyama

Naoharu Shimomura

Daisuke Matsushita

Nobutoshi Aoki

Tsunehiro Ino

Koichi Kato

Mizuki Ono

Masahiro Koike

Masaru Toko

Toshiyuki Enda

Hiroyoshi Tanimoto

Megumi Yakabe

Harumi Seki

Naoki Kusunoki

Riichiro Takaishi

Shogo Itai

Rina Nomoto

Yuichiro Mitani

Takayuki Tsukagoshi

According to one embodiment, a magnetic memory device including a stacked structure including a first magnetic layer having a variable magnetization direction, a second magnetic layer having a fixed magnetization direction, and a nonmagnetic layer provided between the first magnetic layer and the second magnetic layer, and containing magnesium (Mg) and oxygen (O). The nonmagnetic layer further contains a first additive element and a second additive element, the first additive element is at least one element selected from sulfur (S), gallium (Ga), aluminum (Al), titanium (Ti), vanadium (V), hydrogen (H), fluorine (F), manganese (Mn), lithium (Li), nitrogen (N) and magnesium (Mg), and the second additive element is lithium (Li).

Magnetic memory device with nonmagnetic layer having two additive elements

According to one embodiment, a magnetic memory device includes a stacked structure including a first magnetic layer having a variable magnetization direction, a second magnetic layer having a fixed magnetization direction, and a nonmagnetic layer provided between the first magnetic layer and the second magnetic layer, and containing magnesium (Mg) and oxygen (O). The nonmagnetic layer further contains an additive element selected from fluorine (F), sulfur (S), hydrogen (H) and lithium (Li).

Magnetic memory device

A stack of the embodiment includes: a first magnetic substance; a second magnetic substance; and a first nonmagnetic substance which is disposed between the first magnetic substance and the second magnetic substance and contains at least one first metal element (M1) selected from the group consisting of ruthenium (Ru) and osmium (Os) and at least one second metal element (M2) selected from the group consisting of rhodium (Rh) and iridium (Ir). A magnetic device of the embodiment includes: a third magnetic substance; the stack; and a second nonmagnetic substance which is disposed between the third magnetic substance and the stack.

Stack and magnetic device

According to one embodiment, a semiconductor memory device includes: a first interconnect layer; a second interconnect layer adjacent to the first interconnect layer; a semiconductor layer between the first and second interconnect layers; a first charge storage layer between the first interconnect layer and the semiconductor layer; and a second charge storage layer between the second interconnect layer and the semiconductor layer. A first distance between the first and second interconnect layers is shorter than a second distance between the first and second charge storage layers.

Semiconductor memory device

According to one embodiment, a magnetic memory device includes a stacked structure including first and second magnetic layers having variable and fixed magnetization directions, respectively, and a nonmagnetic layer provided between the first and second magnetic layers and containing a first compound containing first cationic and anionic elements, and a predetermined-material layer provided around side surfaces of the stacked structure and containing a second compound containing second added cationic and second added anionic elements. An absolute value of a valence number (ionic valency) of the second added cationic element is less than that of the first cationic element, and an absolute value of a valence number (ionic valency) of the second added anionic element is less than that of the first anionic element.

Magnetic memory device and manufacturing method of the same

According to an aspect of the present invention, there is provided a nonvolatile semiconductor storage device including: a semiconductor substrate; a source region and a drain region that are formed in the semiconductor substrate so as to be separated from each other and so as to define a channel region therebetween; a tunnel insulating film that is formed on the channel region; an insulative charge storage film that is formed on the tunnel insulating film; a conductive charge storage film that is formed on the insulative charge storage film so as to be shorter than the insulative charge storage film in a channel direction; an interlayer insulating film that is formed on the conductive charge storage film; and a gate electrode that is formed on the interlayer insulating film.

Nonvolatile semiconductor storage device and method for manufacturing the same

A magnetic memory according to an embodiment includes: at least one memory cell, the memory cell comprising: a conductive layer including a first terminal, a second terminal, and a portion located between the first terminal and the second terminal; a magnetoresistive element including: a first magnetic layer; a second magnetic layer between the portion and the first magnetic layer; and a nonmagnetic layer between the first magnetic layer and the second magnetic layer; a diode including an anode and a cathode, one of the anode and the cathode being electrically connected to the first magnetic layer; and a transistor including third and fourth terminals and a control terminal, the third terminal being electrically connected to the first terminal.

Spin orbit torque (SOT) magnetic memory cell and array

A semiconductor device according to an embodiment includes a first conductive layer, a second conductive layer, and a dielectric film provided between the first and the second conductive layers. The dielectric film including a fluorite-type crystal and a positive ion site includes Hf and/or Zr, and a negative ion site includes O. In the dielectric film, parameters a, b, c, p, x, y, z, u, v and w satisfy a predetermined relation. The axis length of the a-axis, b-axis and c-axis of the original unit cell is a, b, and c, respectively. An axis in a direction with no reversal symmetry is c-axis, a stacking direction of atomic planes of two kinds formed by negative ions disposed at different positions is a-axis, the remainder is b-axis. The parameters x, y, z, u, v and w are values represented using the parameter p.

Semiconductor device and dielectric film including a fluorite-type crystal

Nonvolatile semiconductor storage device

Nonvolatile semiconductor storage device having conductive and insulative charge storage films

A nonvolatile semiconductor memory device includes a stacked body including electrode films stacked in a first direction; a conductive pillar piercing the stacked body in the first direction; an inner insulating film, a semiconductor pillar, an intermediate insulating film, a memory layer, and an outer insulating film provided between the conductive pillar and the electrode films. The inner insulating film is provided around a side face of the conductive pillar. The semiconductor pillar is provided around a side face of the inner insulating film. The intermediate insulating film is provided around a side face of the semiconductor pillar. The memory layer is provided around a side face of the intermediate insulating film. The outer insulating film is provided around a side face of the memory layer.

Nonvolatile semiconductor memory device and method for manufacturing the same

A nonvolatile semiconductor memory device includes a semiconductor substrate of a first conductivity type, a pair of source and drain diffusion regions of a second conductivity type oppositely formed on a surface of the semiconductor substrate, and a stacked structure having a gate insulating film, a charge accumulation film, an interlayer insulating film and a control gate which are formed in order on a channel region of the surface of the semiconductor substrate interposed between the source and drain diffusion regions. An edge of the stacked structure in the vicinity of the source region is formed away from a junction position between the source diffusion region and the channel region.

Nonvolatile semiconductor memory device and manufacturing method thereof

A semiconductor memory device includes a memory cell which includes a first gate insulation film provided on the semiconductor substrate; a floating gate electrode provided on the first gate insulation film; a second gate insulation film provided on the floating gate electrode; a control gate electrode provided on the second gate insulation film; a source layer and a drain layer that are provided in the semiconductor substrate, the source layer and the drain layer respectively being provided either side of a channel region which is below the floating gate electrode; a source electrode that is electrically connected to the source layer; a buffer film provided on the drain layer; and a memory cell including a drain electrode electrically connected to the drain layer through the buffer film, wherein when viewing the surface of the semiconductor substrate from above, an overlapped area between the floating gate electrode and the drain layer is smaller than an overlapped area between the floating gate electrode and the source layer.

Semiconductor memory device and method of manufacturing the same

Growing community of inventors

Yokohama, Japan

Takamitsu Ishihara