Sony Corporation

Takamasa Tanikuni

Shuji Manda

Kiyotaka Tabuchi

Akiko Ogino

Shinichi Yoshida

Yoichi Otsuka

Shinpei Yamaguchi

Hiromi Wano

There is provided an apparatus including an image sensor of a back-illuminated type using a complementary metal oxide semiconductor (CMOS), including a light receiving unit, formed in a semiconductor substrate, which receives incident light, an anti-reflection film formed on a back-surface side of the semiconductor substrate in which the light receiving unit is formed, and a silicon oxide film, formed on a back-surface side of the anti-reflection film, which has a refractive index lower than a silicon nitride film and has a higher density in a back-surface side than in a front-surface side thereof.

Image sensor, imaging apparatus, and apparatus and method for manufacturing image sensor

A solid-state imaging device includes a plurality of pixels formed on a semiconductor substrate and include a photoelectric conversion unit; a color filter on the pixels; an on-chip microlens made of an organic film on the color filter, corresponding to each of the pixels; a first inorganic film formed on a surface of the on-chip microlens and having a higher refraction index than the on-chip microlens; and a second inorganic film formed on a surface of the first inorganic film and having a lower refraction index than the on-chip microlens and the first inorganic film, in which at least the second inorganic film includes a non-lens area at an interface of an adjacent second inorganic film.

Solid-state imaging device including an on-chip lens with two inorganic films thereon

A solid-state imaging device includes a light-receiving portion, which serves as a pixel, and a waveguide, which is disposed at a location in accordance with the light-receiving portion and which includes a clad layer and a core layer embedded having a refractive index distribution in the wave-guiding direction.

Solid-state imaging device, method for manufacturing solid-state imaging device, and electronic apparatus

Growing community of inventors

Kumamoto, Japan

Takamasa Tanikuni