Toshiba Memory Corporation

Kioxia Corporation

Takamasa Ito

Megumi Ishiduki

Hiroshi Nakaki

Ken Komiya

Hiroki Yamashita

Tsuneo Uenaka

Naoki Yamamoto

Yu Hirotsu

Yoshinori Nakakubo

Kenji Tashiro

Manabu Sakamoto

Kazuhiro Tomishige

Toshiaki Fukuzumi

Hiroshi Matsumoto

According to an embodiment, a semiconductor memory device includes a first conductive layer and second conductive layers arranged at intervals in a first direction above the first conductive layer. A semiconductor layer extends in the first direction in the second conductive layers to be in contact with the first conductive layer. A charge storage layer is between the semiconductor layer and the second conductive layers. A metal layer extends in the first direction and a second direction above the first conductive layer, and separates the second conductive layers. The device further includes an insulating layer. The insulating layer includes a portion between the metal layer and the first conductive layer and a portion between the metal layer and the second conductive layers.

Semiconductor memory device

A semiconductor device includes a base body, a stacked body on the base body and a first columnar part. The base body includes a substrate, a first insulating film on the substrate, a first conductive film on the first insulating film, and a first semiconductor part on the first conductive film. The stacked body includes conductive layers and insulating layers stacked alternately in a stacking direction. The first columnar part is provided inside the stacked body and the first semiconductor part. The first columnar part includes a semiconductor body and a memory film between the semiconductor body and conductive layers. The semiconductor body extends in the stacking direction. The first columnar part has a first diameter and a second diameter in a first direction crossing the stacking direction. The first diameter inside the first semiconductor part is larger than the second diameter inside the stacked body.

Nonvolatile semiconductor memory device including a memory cell

A semiconductor device includes a semiconductor substrate on which a first insulation film is provided. A first conductive film is on the first insulation film. First electrode films are on the first conductive film and stacked. A charge accumulation member is between one of the first electrode films and the semiconductor member. The first conductive film includes a main body arranged below the first electrode films and an outer peripheral portion provided in an outer periphery of the main body to be apart from the main body. First and second slits are alternately provided in the outer peripheral portion, and extend along the outer periphery of the main body. The first and second slits are apart from each other as viewed in the stacking direction, and partly overlap each other as viewed in a first direction directed from the main body toward the outer peripheral portion.

Semiconductor device

A semiconductor storage device includes a substrate, a first conductor layer, a plurality of second conductor layers, and a first contact. The substrate includes a core region, a first region surrounding the core region, and a second region connecting the core region and the first region. The first conductor layer is above the core region, the first region, and the second region. The second conductor layers are above the first conductor layer above the core region. The first contact is above the first region and extends in the thickness direction. The first contact separates the first conductor layer above the first region into a first portion surrounded by the first contact and a second portion surrounding the first contact. The first portion of the first conductor layer includes a first oxidized portion, and the second portion of the first conductor layer includes a second oxidized portion.

Semiconductor storage device having a contact isolated from a conductor layer by oxidized portions and method for manufacturing the same

A semiconductor memory device according to an embodiment includes a substrate, first and second conductive layers, first and second pillars, and a first member. The first conductive layer includes a first portion, a second portion, and a third portion above the second portion. The second conductive layers are stacked above the first conductive layer. The first pillar includes a first semiconductor layer in contact with the first portion in a direction crossing the stacked direction. The second pillar is provided to penetrate the second conductive layers and the third portion in the stacked direction. The first member is provided between the first and second pillars and between the second and third portions.

A semiconductor memory device includes: a substrate including a first and a second regions; first wiring layers disposed in a first direction; a second wiring layer; a third wiring layer closer to the substrate than the first and the second wiring layers; a semiconductor film that penetrates the first and the second wiring layers, and is connected to the third wiring layer; and a gate insulating film disposed between the semiconductor film and the first wiring layers. The first wiring layers include first conductive films opposed to the semiconductor film in the first region, and first films in the second region. The second wiring layer includes a second conductive film opposed to the semiconductor film in the first region, and a second film in the second region. The second film is different from the first films.

According to one embodiment, a device includes: a semiconductor in a first region of interconnects stacked in a first direction; a first conductor including a first body and a first protrusion, the first body provided in a first region, the first protrusion protruding from the first body in a second direction and overlapping with a second region adjacent to the first region in the second direction; a plug on the first protrusion; a insulator between the plug and the interconnects; a second conductor including a second body and a second protrusion, the second body on the first body and contacting the semiconductor, and the second protrusion on the first protrusion and protruding to the second body; and a first layer on the first protrusion, contacting the second protrusion and the insulator, and extending between the second protrusion and the insulator.

A semiconductor storage device includes a base portion, a stacked body, and a first column. The base portion includes a substrate, a semiconductor element on the substrate, lower-layer wiring above the semiconductor element, and a first conductive layer above the lower-layer wiring and made of a metal compound or polycrystal silicon. The stacked body is above the first conductive layer. The stacked body includes second conductive layers and insulating films stacked alternately. The first column includes a semiconductor body and a memory film. The semiconductor body extends in a stacked direction of the stacked body and is electrically connected to the first conductive layer. A memory film has a charge trap between the plurality of second conductive layers and the semiconductor body. The first conductive layer is provided between the stacked body and the lower-layer wiring, and between a peripheral region of the stacked body and the lower-layer wiring.

Semiconductor storage device

A semiconductor memory device includes a first electrode layer extending in a first direction, a second electrode layer above the first electrode layer and extending in the first direction, a third electrode layer above the first electrode layer and extending in the first direction, an insulating member between the second and third electrode layers and extending in the first direction, first semiconductor members extending in the second direction through the first and second electrodes, second semiconductor members extending in the second direction through the first and third electrode layers, and third semiconductor members extending in the second direction, each having a first portion between the second and third electrode layers and in contact with the insulating member, and a second portion extending through the first electrode layer. In the first direction, an arrangement density of the third semiconductor members is lower than that of the first or second semiconductor member.

A semiconductor memory device according to an embodiment includes: a pair of insulating members separated from each other, the pair of insulating members extending in a first direction; a plurality of electrode films and a plurality of inter-layer insulating films disposed between the pair of insulating members and stacked alternately along a second direction, the second direction intersecting the first direction; a plurality of semiconductor pillars extending in the second direction and piercing the plurality of electrode films and the plurality of inter-layer insulating films; and a charge storage film disposed between one of the semiconductor pillars and one of the electrode films. An end portion on one of the insulating members side of a first electrode film of the electrode films is thicker than a central portion of the first electrode film between the pair of insulating members.

Growing community of inventors

Nagoya, Japan

Takamasa Ito