Tohoku University

Mitsui Chemicals, Inc.

Nihon Kohden Corporation

Takahito Ono

Yoshinobu Ono

Mai Kurihara

Masaya Toda

A sensor includes a body member, a volume change body, and a detection member. The body member has a flat plate-like shape, a first end in a first direction being supported, and a storage space opening at at least one of both end faces in a thickness direction. The volume change body, whose volume changes depending on an amount of a target, is supported by the body member so that at least a part of the volume change body is stored in the storage space. The detection member is in contact with a second end in the first direction of the body member, and detects stress caused by the change in the volume of the volume change body.

Sensor, detection method, and sensor manufacturing method

A detecting devicedetects an elastic wave propagating through the air. The detecting deviceincludes: a first electrodethat is a plate having a cantilever structure with a fixed end FX and a free end FR and that vibrates by being bent by the elastic wave; and a second electrodethat is a plate, that is opposed to the first electrode, and that has a predetermined distance from the first electrode. The detecting devicedetects the elastic wave on the basis of a change in capacitance between the first electrode and the second electrode. An end of the second electrodein a direction from the fixed end FX to the free end FR is closer to the fixed end than the free end.

Growing community of inventors

Sendai, Japan

Takahito Ono