Dainippon Screen Mfg. Co., Ltd.

Tokyo Electron Limited

Ajinomoto Co., Ltd.

Bio-Polymer Research Co., Ltd.

Takahisa Hayashi

Takayasu Tsuchida

Naoto Tonouchi

Shigekazu Komatsu

Masahide Okazaki

Fumihiro Yoshinaga

Zenji Wakimoto

Hiromi Chaya

Naoki Tahara

Hisato Yano

Kenji Ueyama

Teruhiko Beppu

Sueharu Horinouchi

Takanori Hyakudomi

Nariaki Fujiwara

Hideshi Yanase

Chieko Ohsumi

Yukihide Shigeno

A probe mark reading device for reading probe marks stormed on electrode pads of semiconductor chips contained in a semiconductor wafer (), comprising a CCD camera () for taking an image of the semiconductor wafer () and outputting the image as an image signal Si, an optical unit () for optically enlarging a location to be photographed by the CCD camera (), a light source () for illuminating the location to be photographed by the CCD camera () with a flash of light generated for a short period of time from when a flash signal Sf is provided, an X-Y stage () capable of changing a position to be photographed by the CCD camera () based on a motor control signal Sm by moving a mounted semiconductor wafer () in an X-direction and a Y-direction, and a computer () for providing control and saving the images after receiving and trimming the image signal Si. With the above configuration, it is possible to read probe marks in a short time without a user having to expend much time or effort.

Probe mark reading device and probe mark reading method

A probe apparatus with control-position detection means is provided for testing an electrical characteristic of a to-be-tested object formed on a substrate W. The probe apparatus includes a prober chamber, a susceptor provided in the prober chamber for placing thereon a to-be-tested object, and a moving mechanism for moving the susceptor in X-, Y-, Z- and &#x3b8;-directions. The probe apparatus further includes a probe card having a plurality of probes and opposing the susceptor, and a first optical length-measuring unit. The first length-measuring unit emits light to the surface of the to-be-tested object placed on the susceptor, and detects the Z-directional position of the to-be-tested object based on the light reflected from the object. The probe apparatus can have a second length-measuring unit.

Probe apparatus with optical length-measuring unit and probe testing method

Gene, group of genes, and novel &bgr;-glucosidase

Gene, group of genes, and novel &bgr;-gluclosidase

An apparatus which can correctly measure and observe optical information obtained from an object by removing a boundary diffraction wave generated from an edge of a pupil of an image pickup lens or an objective lens is provided. An image pickup lens forms a spatial image of an object on a position provided with a microlens array. A plurality of microlenses are arranged in this microlens array, for pixel-separating the spatial image. Light components from the microlenses pass through corresponding microapertures respectively, to be incident upon corresponding photoreceptors respectively for forming images. The microlenses project images of a diaphragm (pupil) of the image pickup lens on the corresponding microapertures respectively. The diameters of the respective microapertures are set to be smaller than the images of the diaphragm of the image pickup lens, so that a boundary diffraction wave which is generated from an edge of the diaphragm of the image pickup lens is blocked by a microaperture array plate and prevented from propagation to the photoreceptors.

Image pickup apparatus, density measuring optical system and scanning

Cellulose-producing microorganism transformed with a gene for an enzyme

An afocal optical system is formed by a paraboroid mirror and an optical element having a stereographic projection characteristics which is defined by the following equation:

Afocal optical system and multibeam recording apparatus comprising the

A telecentric imaging optical system has first and third lens systems each having a positive power, and a second lens system having a negative power. In the imaging optical system, the second lens system is disposed between the first and the third lens systems. The imaging optical system satisfies the following inequalities:

Telecentric imaging optical system

Hybrids of onion and garlic or Chinese chive are obtained by culturing the ovule-embryo after fertilization of the male (e.g. garlic pollen) and female (e.g. onion egg cell) gametes. The hybrids have the useful characteristics of both species and can be propagated.

Hybrid plants of onion and garlic or Chinese chive and method for

An objective lens system for use within a microscope includes a first to an eleventh lens which are disposed in that order from an object side to an image side with predetermined air spacings therebetween. The first lens in the form of a meniscus is made of quartz, and has a concave surface which is directed toward an object side. The second lens in the form of a meniscus is made of quartz, and has a convex surface which is directed toward the object side. Each of the third, fifth, sixth and eighth lenses is made of fluorite, and has a positive power. Each of the fourth, seventh and ninth lenses is made of quartz, and has a negative power. The tenth lens is made of either quartz or fluorite, and has a positive power. The eleventh lens in the form of a meniscus is made of quartz, and has a concave surface which is directed toward the image side. The system transmits ultraviolet and/or far ultraviolet light and corrects chromatic aberration.

Objective lens system for use within microscope

An objective lens system for use within a microscope includes a first to a fourth lenses which are spaced apart from an object side. The first lens is made of either quartz or fluorite, the second and the third lenses are made of quartz, while the fourth lens is made of fluorite. The system transmits ultraviolet and/or far ultraviolet light and correct chromatic aberration. The system is uncomplicated.

An objective lens system for use within a microscope includes six lenses which are spaced apart from an object side. The first, the third and the fifth lenses are made of quartz, the fourth and the sixth lenses are made of fluorite, while the second lens is made of either quartz or fluorite. The system transmits ultraviolet and/or far ultraviolet light is simply constructed and corrects chromatic aberration.

An objective lens system for a microscope. The objective lens system includes a first lens group which includes a lens in the form of meniscus made of quartz or fluorite having a positive power; and a second lens group including a biconcave lens made of quartz and a biconvex lens made of fluorite. The first lens group and the biconcave and biconvex lenses are successively spaced apart from the object side of the system. The system transmits ultraviolet and/or far ultraviolet rays and can correct chromatic aberration. The system is uncomplicated.

Growing community of inventors

Kyoto, Japan

Takahisa Hayashi