Canon Kabushiki Kaisha

Nikon Corporation

Keio University

Takahiro Yamamoto

Hajime Ichikawa

Kotaro Izumiya

Koichiro Oishi

Yohei Sato

Ayaka Odachi

Naohiro Iwata

Yousuke Sugai

Tomofumi Nishikawara

Koichi Hishida

Yuusuke Suzuki

Nozomu Ogawa

Taiki Mouri

Shankar Devasenathipathy

Printer

In the system, the image forming apparatus includes a unit that sends the status information of the image forming apparatus to the management server, and a unit that requests the web service provided by the service server to register device information, and the service server includes a unit that register and manage user information of a user of the web service provided by the service server, a unit that, in response to a request from the image forming apparatus, registers the device information of the image forming apparatus and user information managed in association with each other, and a unit that issues, to the user of the image forming apparatus that is registered with the web service, a notification related to the image forming apparatus, using the status information provided by the management server.

System and control method therefor

The present invention provides a measurement apparatus for measuring a shape of a test surface, comprising an optical system configured to irradiate a measurement point on the test surface and a reference surface with light, and cause test light and reference light reflected to interfere with each other, a detector configured to detect an optical path length difference between the test light and the reference light by using interfering light and a processor configured to determine a position of the measurement point based on a plurality of detection results by the detector, wherein a detection result includes an error which cyclically changes, and the plurality of detection results include n detection results obtained in n states in which optical path lengths of the test light are different from each other by 1/n (n&#x2265;2) of a cycle of the error.

Measurement apparatus and method that measure shape of surface while canceling cyclical errors to zero by summing of cyclic errors having different phases

A measuring apparatus includes a light projecting and receiving device configured to project and receive light, and measures an object based on the projected and received light. The measuring apparatus comprises a chamber configured to enclose a first space for accommodating the object; a partition configured to separate the first space from a second space which accommodates the light projecting and receiving device, and configured to transmit the light; a first regulator configured to regulate temperature of the first space to a first temperature by flowing a gas through the first space; and a second regulator configured to regulate temperature of the second space to a second temperature different from the first temperature by flowing a gas through the second space. The partition includes a plurality of partition walls disposed with a gap.

Measuring apparatus

A plurality of types of liquid with different electrical conductivity flow through a micro channel having a plurality of channels. When an electric field is applied thereto, an electrokinetic driving flow generated in the micro channel attracts objective submicron particles to one side. Therefore, the particles are completely separated in a single operation by use of the micro channel having extremely simple structure, without the necessity of special machining of the channels and the like.

Method and device for separating particle

A non-spherical surface shape measuring device and method that measures the shapes of object surfaces that have rotationally symmetrical non-spherical surface shapes on the basis of relative deviation values from the shape of a reference surface, the non-spherical surface shape measuring device includes a measuring means for obtaining relative deviation values between a reference surface and an object surface by measuring corresponding sampling points on the surfaces of the reference surface and the object surface and storing predetermined coefficients of variables prior to measurement. A first operating means approximates the partial differential coefficients for the predetermined variables and models the relative displacement, between the object surface and the reference surface and the XY-coordinates of the sampling points, into functional equivalents of the partial differential coefficients. A second operating means approximates the relative displacement between the object surface and the reference surface and a third operating means corrects the relative deviation values according to the relative displacement approximated by the second operating means.

Non-spherical surface shape measuring device

A method is provided for deriving an absolute surface profile of an object having a rotationally symmetric component and a rotationally asymmetric component using a detection system for measuring a relative surface profile of the object with respect to a predetermined reference surface. The method includes the steps of positioning the object to a first predetermined position relative to the detection system, rotating the object around a predetermined measurement axis of rotation at the first predetermined position, acquiring data indicating the relative surface profile of the object with respect to the predetermined reference surface at each of a plurality of rotational positions of the object during the rotating step, averaging the data acquired in the acquiring step over the plurality of rotational positions to derive a rotationally averaged data, and processing the rotationally averaged data and the data indicating the relative surface profile of the object at at least one of the plurality of rotational positions of the object to derive the rotationally asymmetric component of the absolute surface profile of the object. The method further includes the steps of translating the object to a second predetermined position relative to the detection system, acquiring data indicating the relative surface profile of the object at the second predetermined position, and processing the data indicating the relative surface profile of the object at the second predetermined position and at least one of the rotationally averaged data and the data indicating the relative surface profile at at least one of the plurality of rotational positions of the object to derive the rotationally symmetric component of the absolute surface profile of the object, the data processing using a polynomial best fitting method for the data indicating the relative surface profile at the second predetermined position.

Apparatus and method for wavefront absolute calibration and method of

Growing community of inventors

Yokohama, Japan

Takahiro Yamamoto