Ykk Corporation

Hitachi High-Tech Corporation

Toyota Boshoku Corporation

Takahiro Usui

Tetsuya Yoshino

Hiroyuki Chiba

Yuki Suda

Hiroshi Ishisaka

Tatsuya Hirato

Yoshito Toribuchi

Masahiro Ujihara

Provided is a charged particle beam device using a detector that detects electromagnetic waves, in which a circumstance in a sample chamber can be checked, and a sample is observed with the detector at the same time. The charged particle beam device that observes a sample by using a charged particle beam, including: a component used for observing the sample; a detector that detects electromagnetic waves; a chamber scope that photographs a picture while irradiating the sample with the electromagnetic waves; and a control unit that controls the detector, the component, and an operation of the chamber scope, in which the control unit can be selectively operated in any one of a pre-photographing mode and an observation mode, the control unit causes the chamber scope to photograph the picture, in a state in which an operation of observing the sample by the detector is not performed in the pre-photographing mode, and the control unit, in the observation mode, does not cause the chamber scope to apply the electromagnetic waves, generates a guide image showing a positional relationship between the sample and the component based on the picture, and outputs the guide image.

Charged particle beam device

A first member includes a first fixing portion on which a sheet edge is fixed, a holder continuous with an end of the first fixing portion, a first recess that is defined in the holder and has an opening in a continuous direction of the first fixing portion, and a support portion that is formed opposite the first fixing portion across the opening of the first recess of the holder. A second member includes a second fixing portion on which the other sheet edge is fixed, a held portion continuous with an end of the second fixing portion. When the held portion is inserted into the first recess, the support portion is brought into contact with a surface of the second fixing portion.

Sheet fastener

Growing community of inventors

Tokyo, Japan

Takahiro Usui