Fujikin Inc.

Tokyo Electron Limited

Kokusai Electric Corporation

Takahiro Matsuda

Tsutomu Shinohara

Kenji Aikawa

Tomohiro Nakata

Kazunari Watanabe

Kohei Shigyou

Akihiro Harada

Mutsunori Koyomogi

Masahiko Ochiishi

Toshiyuki Inada

Michio Yamaji

Ryutaro Tanno

Yuya Suzuki

Katsunori Komehana

Kouji Nishino

Takashi Hirose

Izuru Shikata

Megumu Makino

Hajime Nakagawa

Ryuji Yogo

Yuta Motegi

Nobukazu Ikeda

Ryousuke Dohi

Masaaki Nagase

Kaoru Hirata

Jun Hirose

Yohei Uchida

Hidenobu Sato

Kazuyuki Tezuka

Takahiro Imai

Tomoyuki Ishikawa

Shinya Nojima

Haruhiko Kuriki

Takahiro Yoshida

Jun Yokota

Thanh T Nguyen

Tetsuo Naritomi

Hiroshi Unami

Yuji Saiki

Yusuke Iwanaga

A diaphragm valve, which is miniaturized while ensuring a required flow rate and has improved assemble workability and maintainability, includes a body defining a flow path; a diaphragm provided on a bottom surface of an accommodation recess; a fixing ring screwed with a screw portion formed on an inner peripheral surface of the accommodation recess to fix the diaphragm to the body; a stacked piezoelectric actuator; a support plate supporting the stacked piezoelectric actuator; a cylindrical actuator cover holding a diaphragm presser and configured to transmit the piezoelectric displacement of the stacked piezoelectric actuator while accommodating the stacked piezoelectric actuator inside; and a fixing member screwed with the common screw portion and cooperating with the fixing ring to fix the position of the support plate in the accommodation recess.

Diaphragm valve and flow rate control device

To enable accurate and simple diagnosis of an operation abnormality of a valve. A valve Vcapable of detecting an operation abnormality has a magnet Mthat is attached in the vicinity of a pressing adapterof a stemthat slides according to an opening/closing operation of the valve V, and a magnetic sensor Mthat is attached to a surface acing the stem, inside the pressing adapterthat presses a peripheral edge of a diaphragm, and detects a change in a distance between the magnet Mand the magnetic sensor M. Further, an abnormality determination mechanism compares the change in the distance between the magnet Mand the magnetic sensor Mat the time of abnormality diagnosis detected by the magnetic sensor Mand a previously measured change in the distance between the magnet M and the magnetic sensor Mat the time of normality, and determines whether or not there is an abnormality.

Valve, abnormality diagnosis method of valve

A flow-path forming block includes: a first block; a second block attached to the first block, the second block having a first flow path and a second flow path; and a gasket provided between the first block and the second block, the gasket being configured to seal between the first block and the second block, wherein the second block has a communication portion formed on a surface facing the gasket, the communication portion being configured such that the first flow path and the second flow path are communicated, and the gasket has a recessed portion formed at a position facing the communication portion.

Flow-path forming block and fluid control device provided with flow-path forming block

A fluid control device includes: a joint block defining a fluid flow path open to an upper surface thereof, and which has an engaging portion on the bottom surface side thereof; a support member having a guide portion which restrains the joint block on the upper surface while permitting the joint block to move in longitudinal direction; and a fluid device fixed to the upper surface of the joint block. The support member is provided with at least one plunger such that the tip end portion protrudes from the upper surface of the support member. A recess is provided in the bottom surface of the joint block, and the recess engages with the tip end portion of the plunger to set the position of the joint block in the longitudinal direction.

Fluid control device and manufacturing method for the fluid control device

A valve device with a built-in orifice is manufacturable with low-cost. The valve body defines an accommodation recess which opens at the surface of the valve body and contains a valve element therein, a primary flow path and a secondary flow path connected to the accommodation recess, the valve element having a sealing portion for blocking direct communication between the primary flow path and the secondary flow path through the accommodation recess, and a through flow passage for making the primary flow path and the secondary flow path communicate through the valve element, wherein an orifice is formed in the through flow passage.

Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device

A fluid control device includes a first block row and a second block row each including a plurality of joint blocks having a width of the standard size and arranged along a first directions, the first block row and the second block row being arranged at predetermined intervals in the second directions perpendicular to the first directions, wherein each of the plurality of joint blocks constituting the first block row has a large diameter flow path for forming a single line, and each of the plurality of joint blocks constituting the second block row has a smaller diameter flow path than the large diameter flow path for forming the first line and the second line.

Fluid control device and semiconductor manufacturing apparatus

A valve device can be compact, low cost and has a bleed function. A valve body defines an accommodation recess which opens at a surface of the valve body and contains a valve element therein, a primary flow path and a secondary flow path connected to the accommodation recess, the valve element having a sealing portion for blocking direct communication between the primary flow path and the secondary flow path through the accommodation recess, a detour passage for making the primary flow path and the secondary flow path communicate through the valve element, and a bleed hole for making the detour passage and the secondary flow path communicate through the accommodation recess.

To diagnose an abnormality of a fluid control device from an operation of an entire fluid supply line including a plurality of fluid control devices. Provided is an abnormality diagnosis method of a fluid supply line including a plurality of fluid control devices F, V, and Vcommunicating with each other fluid-tightly. The abnormality diagnosis method has: a valve operation step of opening/closing any one or more of a valve FV in a flow rate control device, a valve V, and a valve V; a pressure adjustment step of setting a part or all of flow passages Rand Rleading from the valve Vto the valve Vvia the flow rate control device to a vacuum state or a pressurization state; a pressure detection step of acquiring temporal pressure characteristics in a flow passage of the flow rate control device F by pressure detection mechanisms Pand P; and an abnormality determination step of comparing pressure characteristics at the time of abnormality diagnosis acquired by the pressure detection mechanisms Pand Pand pressure characteristics at the time of normality measured in advance under the same conditions, and determining whether or not there is an abnormality.

Abnormality diagnosis method of fluid supply line

The present invention provides a miniaturized valve device capable of dramatically increasing the degree of freedom in arranging a flow path of a valve body while securing a necessary flow rate. The valve device includes a valve seat support provided in an accommodation recess and having a support surface with which a sealing surface of a valve seat abuts and supports a pressing force from the sealing surface; a diaphragm provided in the accommodation recess so as to abut and be separable from a seating surface of the valve seat and seals the opening side of the accommodation recess; the valve seat support having sealing surfaces which cooperates with a part of the inner wall surface of the accommodation recess to bock the communication between a primary flow path and a secondary flow path, and a detour passage that connects the primary flow path and a flow passage of the valve seat.

Valve device

A valve device includes: a body having a substantially block shape in which first and second valve chambers are recessed from an upper surface, and three flow paths communicating with the first valve chamber and three flow paths communicating with the second valve chamber are formed inside the body; first and second valve members disposed in the first and second valve chambers, respectively, to switch between communication and disconnection between one of the three flow paths and the other two flow paths; and first and second actuators for respectively driving the first and second valve members, wherein the other two flow paths communicating with the each of valve chambers have respective ports on the lower surface of the body, while the one flow path has a common port on the lower surface of the body.

Valve device and fluid control device

The present invention is intended to improve the accuracy of control of a material gas by providing a valve with simplified wiring and a fluid supply line equipped with the valve. A valve V includes a valve bodyand a driving pressure control devicecoupled to the valve body. The driving pressure control deviceincludes: a driving pressure introduction pathconnected to a driving pressure supply source G outside a line; an automatic valvethat opens and closes the driving pressure introduction path; a driving pressure introduction paththat couples to a driving pressure introduction portof the valve body; an automatic valvethat opens and closes the driving pressure introduction pathin conjunction with the automatic valveand opens and closes an exhaust passagethat discharges a driving pressure from the driving pressure introduction path; and a driving pressure introduction paththat couples the driving pressure introduction pathand the driving pressure introduction pathvia the automatic valveand the automatic valve

Valve and fluid supply line

A valve device includes valve elements each having a valve seat, a valve seat support, and a diaphragm provided so as to be able to abut on and separate from the seat surface of the valve seat, the diaphragm making the flow passage of the valve seat and the corresponding secondary flow path communicate through the gap between the diaphragm and the valve seat, and the valve seat support has seal surfaces that cooperate with a part of the inner wall surface of the corresponding accommodation recess to shut off the communication between the corresponding primary flow path and the secondary flow path, and a detour passage that connects the primary flow path and the flow passage of the valve seat, and the valve body defines a communication passage that makes the secondary flow paths communicates with each other.

A flow path assembly incorporating functional components, such as orifices and filters, is provided in which gaps between the functional components and the flow path components defining the flow path are sealed for an extended period of time. An annular elastic member interposed between the flow path members is provided outside the opposing surfaces of the flow path members, the flow path member has a caulking portion, the caulking portion integrates the flow path members and the plate-like member, exerts a force on the flow path member such that one of the opposing surfaces faces the other of the opposing surfaces, seals the gaps between the orifice plate and the opposing surfaces, and the elastic member is crushed between the flow path members to seal the gap between the flow path members.

Flow path assembly and valve device

A screw hole of an upstream side joining block is formed only on an upstream side of a flow path port thereof in a longitudinal direction, a screw hole of a downstream side joining block is formed only on a downstream side of a flow path port thereof in the longitudinal direction and, between a guide part and an engaging part, an alignment mechanism aligns the positions of the upstream side and the downstream side joining blocks in a horizontal direction orthogonal to the longitudinal direction of the guide part to a center position of the guide part by using a portion of a reaction force that resists a bending force produced by the tightening force of a tightening bolt on a body and the upstream side and the downstream side joining blocks connected to each other.

Fluid control system

A method for detecting the concentration of a specified gas contained in a mixed gas includes, in a pressure-type flow rate control device including a restriction portion, an upstream valve provided upstream of the restriction portion, and a pressure sensor for measuring the pressure between the restriction portion and the upstream valve, a step of flowing the mixed gas from the upstream side of the upstream valve in a state in which the pressure on the downstream side of the restriction portion is lower than the pressure on the upstream side of the restriction portion, a step of determining with a pressure sensor pressure drop characteristics occurring after the upstream valve is changed from an open to a closed state, and a step of determining the concentration of the specified gas in the mixed gas based on the pressure drop characteristics.

Growing community of inventors

Osaka, Japan

Takahiro Matsuda