Ngk Insulators, Inc.

Takahiro Maeda

Tsutomu Nanataki

Yukihisa Takeuchi

Morimichi Watanabe

Kei Sato

Hisanori Yamamoto

Makoto Ohmori

Jun Yoshikawa

Natsumi Shimogawa

Katsuyuki Takeuchi

Hideo Masumori

Kiyoshi Matsushima

An oriented ceramic sintered body production method includes (a) a step of preparing a ceramic compact before firing into an oriented ceramic sintered body; and (b) a step of obtaining an oriented ceramic sintered body by sandwiching the ceramic compact between a pair of releasing sheets, placing the ceramic compact and the releasing sheets in a hot press firing furnace, and hot press firing the ceramic compact while applying a pressure by a pair of punches through the pair of releasing sheets, wherein each of the releasing sheets is a releasing sheet such that, after the releasing sheet is sandwiched between PET films, is then placed and vacuum-packed on a stainless steel sheet, and is isostatically pressed at 200 kg/cm, a surface of the releasing sheet on the side opposite from the stainless steel sheet has a profile curve with a total profile height Pt of 0.8 μm or less.

Oriented ceramic sintered body production method and flat sheet

A method for producing an oriented sintered body according to the present invention includes the steps of: (a) preparing a multilayer body, the multilayer body including a layer including a fine raw-material powder and a layer including a plate-like raw-material powder which are alternately stacked each other, particles of the plate-like raw-material powder being arranged such that surfaces of the particles of the plate-like raw-material powder extend along a surface of the layer including a fine raw-material powder; and (b) sintering the multilayer body.

Method for producing oriented sintered body

A thin plate member has a uniform thickness of not less than 5 &#x3bc;m and not more than 100 &#x3bc;m, includes at least a ceramic sheet, formed by sintering. The thin plate member has plural convex portions protruding from one plane P of the thin plate member, and plural concave portions caved in from the plane P. Accordingly, the deflection amount obtained when the thin plate member is supported at a predetermined support section of the thin plate member in a direction orthogonal to the plane P is smaller than the deflection amount of a thin plate member that is flat without having convex and concave portions. Therefore, a thin plate member which is difficult to be deformed is provided.

Ceramic thin plate member

A ceramic green sheet includes ceramic particles having a spherical diameter of 0.01-0.5 .mu.m of a primary particle as a ceramic component, an average degree of aggregation of 10 or less, wherein the ceramic green sheet contains at most 1 vol % of secondary particles having a diameter of 20 .mu.m or more and has a surface roughness (Ra) of 0.2 .mu.m or less. A method for producing a ceramic substrate having a thickness of 30 .mu.m or less includes the steps of: preparing a ceramic slurry by mixing a ceramic powder with an organic binder and at least one organic solvent, and adjusting a viscosity to be within the range of 100-10,000 mPa.s; removing coarse aggregated particles from the ceramic slurry; molding the ceramic slurry into a ceramic green sheet by a reverse roll coater method; and firing the ceramic green sheet so that an average crystal grain size be 2 .mu.m or less.

Zirconia ceramic green sheet

A ceramic green sheet includes ceramic particles having a spherical diameter of 0.01-0.5 .mu.m of a primary particle as a ceramic component, an average degree of aggregation of 10 or less, wherein the ceramic green sheet contains at most 1 vol % of secondary particles having a diameter of 20 .mu.m or more and has a surface roughness (Ra) of 0.2 .mu.m or less. A method for producing a ceramic substrate having a thickness of 30 .mu.m or less includes the steps of: preparing a ceramic slurry by mixing a ceramic powder with an organic binder and at least one organic solvent, and adjusting a viscosity to be within the range of 100-10,000 mPa's; removing coarse aggregated particles from the ceramic slurry; molding the ceramic slurry into a ceramic green sheet by a reverse roll coater method; and firing the ceramic green sheet so that an average crystal grain size be 2 .mu.m or less.

Method for producing ceramic substrate

A ceramic diaphragm structure which includes a ceramic substrate having at least one window, and a ceramic diaphragm plate which is superposed on the ceramic substrate so as to close the window or windows. The diaphragm plate is fired with the ceramic substrate to form an integral sintered body. The diaphragm plate includes at least one diaphragm portion which is/are aligned with the window(s), respectively, and each diaphragm portion protrudes outwards, in a direction away from the corresponding window, to form a convex shape. Also disclosed is a method of protuding such a ceramic diaphragm structure, in which the diaphragm portion is formed into convex shape, upon firing of the ceramic substrate and ceramic diaphragm plate.

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Ichinomiya, Japan

Takahiro Maeda