Canon Kabushiki Kaisha

Takahiro Ezaki

Yasuhiro Soeda

Chienliu Chang

Kenji Tamamori

Takeo Yamazaki

Takeshi Imamura

Toru Nakakubo

Atsunori Terasaki

Susumu Yasuda

Hideyuki Itoh

An electromechanical transducer includes multiple elements each having multiple cells, with each cell including a first electrode formed from a conductive substrate, and a second electrode opposed to a first face of the conductive substrate and across a gap. The multiple cells of each of the elements are electrically connected, and the conductive substrate is divided for each of the elements by grooves extending from the first face to a second face which is opposite from the first face. In addition, insulating films are formed on opposing side walls of the conductive substrate and define each of the grooves, wherein a gap width of each of the grooves is narrower on the second face side of the conductive substrate than on the first face side of the conductive substrate.

Electromechanical transducer and method of manufacturing the same

An element array comprises a plurality of elements having a first electrode and a second electrode with a gap therebetween; the first electrode is separated for each of the elements by grooves, an insulating connection substrate is bonded to the first electrode, and wirings are provided from the respective first electrodes through the connection substrate to the side opposite to the first electrodes.

Element array with a plurality of electromechanical conversion devices

A process for producing a capacitive electromechanical conversion device by bonding together a substrate and a membrane member to form a cavity sealed between the substrate and the membrane member, the process for producing a capacitive electromechanical conversion device comprises the steps of: providing a gas release path penetrating from a bonded interface between the substrate and the membrane member to the outside, and forming the cavity by bonding the membrane member with the substrate with the gas release path provided; the gas release path being provided at a location where the path does not communicate with the cavity.

Process for producing capacitive electromechanical conversion device, and capacitive electromechanical conversion device

Element array, electromechanical conversion device, and process for producing the same

An electromechanical transducer includes a plurality of devices each including at least one cell including a first electrode and a second electrode facing each other across a gap, and an outer frame extending along an outer periphery of the plurality of devices. The first electrode of each of the devices includes a plurality of portions formed by electrically separating a device substrate with grooves, and the outer frame includes a part of the device substrate surrounding the plurality of portions and electrically separated from the plurality of portions by the grooves. The first electrodes each including the plurality of portions are respectively bonded to a plurality of conductive portions of another substrate via a plurality of electrode connection portions, and the outer frame is bonded to a corresponding portion of the another substrate via a circular outer frame connection portion which surrounds the electrode connection portions.

A fluid-conveying apparatus conveys fluid using a channel for the fluid to flow. The apparatus includes a pressure-generating device for generating pressure for conveying the fluid, a plurality of processing areas for processing the fluid, a valve which is disposed between the processing areas and controls the fluid flow, and a pressure-relieving device for relieving the pressure in the channel.

Fluid-conveying apparatus and method for conveying fluid by using the same

A fluid delivery device is provided which comprises a microchannel device for cutting out a certain amount of a sample from a micorochannel by controlling a valve opening. The fluid delivery device has a valve for controlling a flow of a fluid, comprising a flow channel for the fluid, and a valve in the flow channel, wherein the valve operates in accordance with a pressure difference between the upstream side and downstream side of the valve caused by the flow of the fluid through the flow channel, allowing the fluid to flow when the pressure difference is lower than a prescribed value P, and intercepting the fluid not to flow when the pressure difference is Por more.

Growing community of inventors

Yokohama, Japan

Takahiro Ezaki